Abstract-Several novel devices under development in our laboratories to ultimately realize a micro robotic system for single cell nano-scale probing, injection, imaging and surgery is described in this paper. Thus far, we have 1) developed MEMS polymer grippers that can be actuated under water with very large deflection and are capable of gripping 500um embryonic cells in water with ~2V input; 2) developed a probe-etching technique to controllably shape fiber probes into various tip geometries, i.e., fibers with initial diameter of 125um were sharpened into tips with angles ranging from <2.7 -9.7 o and with nano-scale tip diameters of <1um; 3) developed a novel PVDF force sensing system with resolution in the sub-uN range for applications in bio-manipulation, bio-injection, and potentially single cell surgery. Details of these technologies are discussed in this paper.