Laminated fitting fabrication of Cu–Sn composite 3D microelectrodes and elimination of ridges on the machined surface of 3D micro-cavities

Surface Quality Improvement of 3D Microstructures Fabricated by Micro-EDM with a Composite 3D Microelectrode

“…Figure 4 shows the cross-section profile of the V-shaped microelectrodes when bonding time is 15 h, bonding temperature is 900 °C, 950 °C and 1000 °C respectively. The bonding time of 15 h can guarantee that Sn and Cu atoms diffuse adequately [ 28 ]. It can be seen that, when bonding temperature was 900 °C, the steps were obvious, and no interface compounds was extruded at the steps ( Figure 4 a).…”

“…The working fluid used in the micro-EDM process was deionized water. According to the previous study [ 26 , 27 , 28 ], the machining conditions are selected to prepare the 3D microelectrodes and microstructures, as listed in Table 1 .…”

“…However, numerous and obvious ridges emerged on the machining surface of the 3D microstructure duo to imperfect thermal diffusion bonding between the Cu foils. To eliminate ridges on the machining surface, using Cu foils coated with Sn film as laminated materials, Lei et al [ 28 ] manufactured laminated composite 3D microelectrodes by femtosecond laser cutting using a bending-and-avoidance mode and transient liquid phase bonding. Moreover, 3D microstructures without ridges on the surface were successfully machined by up-and-down reciprocating micro-EDM with the composite 3D microelectrodes.…”

Micro-electrical discharge machining of 3D micro-molds from Pd40Cu30P20Ni10metallic glass by using laminated 3D micro-electrodes

“…In previous work, we fabricated 3D micro-electrodes and applied them to process 304# stainless steel with micro-EDM [14,15]. From the machining result shown in figure 1, there are some ridges on the surface of the 3D micro-molds.…”

“…Fabricating 3D micro-electrodes mainly includes WEDM station and vacuum pressure thermal diffusion welding station, which is called micro double-staged laminated object manufacturing (micro-DLOM) [14,15]. A sketch of the process of fabricating 3D micro-electrodes with micro-DLOM process is shown in figure 1 and the specific process is described as follows:…”