2010
DOI: 10.1109/tuffc.2010.1719
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Langasite as a piezoelectric material for near-field microscopy resonant cantilevers

Abstract: Quartz length-extension resonators have already been used to obtain atomically-resolved images by frequency-modulation atomic force microscopy. Other piezoelectric materials such as gallium orthophosphate (GaPO(4)), langatate (LGT), and langasite (LGS) could be appropriate for this application. In this paper, the advantages of langasite crystal are presented and the fabrication of similar microsensors in langasite temperature-compensated cuts by chemical etching is proved. A monolithic length extension resonat… Show more

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Cited by 4 publications
(2 citation statements)
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“…We show in this study that this shear effect is due to the rigidity coefficient s 14 which is different from zero. Observation of this phenomenon is given in this paper by modeling a sensor used in Frequency Modulation Atomic Force Microscopy [1]. Further calculations were then conducted to explore the evolution of the coefficients involved in the shear effects for beams aligned along a direction which is in the YZ plane.…”
Section: Theoretical Considerationsmentioning
confidence: 99%
“…We show in this study that this shear effect is due to the rigidity coefficient s 14 which is different from zero. Observation of this phenomenon is given in this paper by modeling a sensor used in Frequency Modulation Atomic Force Microscopy [1]. Further calculations were then conducted to explore the evolution of the coefficients involved in the shear effects for beams aligned along a direction which is in the YZ plane.…”
Section: Theoretical Considerationsmentioning
confidence: 99%
“…La 3 Ga 5 SiO 14 (LGS) is an excellent piezoelectric crystal which has been attracting extensive attention in the application of making surface acoustic wave (SAW) devices [1][2][3][4]. Compared to quartz, it has higher electromechanical coupling factors(k 2 ) because of its larger piezoelectric coefficients [5].…”
Section: Introductionmentioning
confidence: 99%