Large-area mosaic diamond films approaching single-crystal quality

Geis, M. W.; Smith, Henry I.; Argoitia, Alberto; Angus, John C.; G.‐H., M.; Glass, J. T.; Butler, James E.; Robinson, C. Jane; Pryor, Roger W.

doi:10.1063/1.104851

Cited by 76 publications

(14 citation statements)

References 9 publications

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“…This is because they reveal the lowest concentrations of point and extended defects [1][2][3][4]. Therefore, in recent years the deposition of {001} textured layers either directly on silicon and silicon-carbide substrates [5][6][7][8], or on a large number of small aligned diamond seed crystals [9,10], has gained more and number of single crystals, which were deposited by the acetylene-oxygen combustion flame technique [16,17], will be studied. The specimens were homoepitaxially grown on natural type IIa diamond substrates of which some already had a relatively thin epitaxial layer obtained by hot-filament-assisted chemical vapour deposition (HFCVD) [3,11].…”

Section: Introductionmentioning

confidence: 99%

Mosaic growth of diamond: a study of homoepitaxial flame deposition and etching of {001}-oriented diamond layers

Schermer

Theije

Giling

1996

Journal of Crystal Growth

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This study describes homoepitaxial growth and etch phenomena observed on cubic diamond faces as obtained by the application of an acetylene-oxygen combustion flame. It is demonstrated that flame etching of the diamond substrates prior to growth decreases the number of crystallographic imperfections in the diamond layers especially at the edges. This enables a more uniform distributed step generation by the large number of individual dislocations present in the used natural type IIa diamond substrates. Due to this improvement it appears possible to grow one single crystal diamond layer on top of several closely spaced, well-aligned natural diamond substrates. In the present work the overgrowth of a three-piece mosaic structure with gaps along (100) as well as along (110) is reported for the first time. The single crystal nature of this flame-deposited diamond layer could be confirmed by the observation of continuous growth step patterns at the surface across the joint regions. The widths of the gaps between the substrates in the original mosaic structure varied from 7 to 25 ~m, which is more than an order of magnitude larger than the gaps along (100) in two-piece mosaic structures, of which the single crystal overgrowth by HFCVD was previously reported. Comparison of micro-Raman spectra obtained from the joint regions with those from other parts of the overgrown mosaics discussed in the present work, show a larger FWHM of the diamond peak in case of a (110) joint and a shift of the peak position to higher wave numbers in case of a (100) joint.

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Section: Introductionmentioning

confidence: 99%

Mosaic growth of diamond: a study of homoepitaxial flame deposition and etching of {001}-oriented diamond layers

Schermer

Theije

Giling

1996

Journal of Crystal Growth

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“…A formation of so called "mosaic" structures has been attempted as early as 1991 by Geis et al 5 Other groups including Findeling-Dufour's 6 , Janssen's 7 , and Meguro's 8 also have done similar work during 1993-1997. Kobashi et al 9 have tried similar research in 2003, in which he deposited a single crystal diamond layer on the top of a 4x4 matrix of single crystal diamond plates as seed (Fig.…”

Section: Technical Backgroundmentioning

confidence: 81%

Large Eddy Simulations of Surface Winds Above Water Waves: Effects of Wind-Wave Alignment and Wave Age

Sullivan¹

2008

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“…Interesting attempts to grow a single-crystal diamond from smaller crystallites were made in Refs [120,121]. In Ref.…”

Section: Mosaic Diamond Substratementioning

confidence: 99%

Prospects for the synthesis of large single-crystal diamonds

Khmelnitskiy¹

2015

Phys.-Usp.

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The unique properties of diamond have stimulated the study of and search for its applications in many fields, including optics, optoelectronics, electronics, biology, and electrochemistry. Whereas chemical vapor deposition allows the growth of polycrystalline diamond plates more than 200 mm in diameter, most current diamond application technologies require largesize (25 mm and more) single-crystal diamond substrates or films suitable for the photolithography process. This is quite a challenge, because the largest diamond crystals currently available are 10 mm or less in size. This review examines three promising approaches to fabricating large-size diamond single crystals: growing large-size single crystals, the deposition of heteroepitaxial diamond films on single-crystal substrates, and the preparation of composite diamond substrates.

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Large-area mosaic diamond films approaching single-crystal quality

Cited by 76 publications

References 9 publications

Mosaic growth of diamond: a study of homoepitaxial flame deposition and etching of {001}-oriented diamond layers

Mosaic growth of diamond: a study of homoepitaxial flame deposition and etching of {001}-oriented diamond layers

Large Eddy Simulations of Surface Winds Above Water Waves: Effects of Wind-Wave Alignment and Wave Age

Prospects for the synthesis of large single-crystal diamonds

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