2014
DOI: 10.1002/aenm.201301631
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Large‐Area Rolled‐Up Nanomembrane Capacitor Arrays for Electrostatic Energy Storage

Abstract: The fabrication, characterization, and optimization of large area rolled-up ultracompact nanomembrane-based capacitor arrays is demonstrated by combining bottom-up and top-down fabrication methods. The scalability of the process is tested on a 4-inch wafer platform where 1600 devices are manufactured in parallel. By using a hybrid dielectric layer consisting of HfO 2 and TiO 2 incorporated into an Al 2 O 3 matrix, rolled-up ultracompact capacitors can have their capacitance per footprint area increased by over… Show more

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Cited by 76 publications
(85 citation statements)
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“…[ 280 ] Similarly, Sharma et al designed large area, rolled-up nanomembrane-based capacitor arrays by combining bottom-up and top-down fabrication methods. [ 308 ] Considerable scale-up was achieved, enabling parallel fabrication of more than 1600 devices on a 4-inch wafer. As mentioned by the authors, the fabricated electrostatic rolled-up ultra-compact energy-storage elements have a large potential in powering various autonomous microsystems.…”
Section: Wileyonlinelibrarycommentioning
confidence: 99%
“…[ 280 ] Similarly, Sharma et al designed large area, rolled-up nanomembrane-based capacitor arrays by combining bottom-up and top-down fabrication methods. [ 308 ] Considerable scale-up was achieved, enabling parallel fabrication of more than 1600 devices on a 4-inch wafer. As mentioned by the authors, the fabricated electrostatic rolled-up ultra-compact energy-storage elements have a large potential in powering various autonomous microsystems.…”
Section: Wileyonlinelibrarycommentioning
confidence: 99%
“…The capacity gradually decreases with increasing current density from a low current rate of 0.1 A g −1 to a high current rate of 25 A g −1 and the capacity reversibly recovers to ≈1000 mA h g −1 once the current rate goes back to 0.5 A g −1 . In addition to the improved stability, the energy storage device based on rolled‐up nanomembrane also has the advantages of miniaturization of the volume and reduction of the footprint area …”
Section: Nanomembrane Origamimentioning
confidence: 99%
“…[29] In their work, both the electrical properties and capacitance per footprint area of the UCCaps are improved with a similar selfrolling technology. [29] In their work, both the electrical properties and capacitance per footprint area of the UCCaps are improved with a similar selfrolling technology.…”
Section: Large-area Rolled-up Capacitor Arrays For Electrostatic Enermentioning
confidence: 99%
“…[11,12] Noticeably, nanomateirals derived from rolledup nanotechnology have attracted world wide interest recently, and remarkable progress has been made when introducing this technology into the design of energy storage devices. [26][27][28][29][30] In this report, we focus on the recent progress of using rolledup nanostructured materials as electrodes to develop advanced EES devices, including Liion batteries (LIBs) and LiO 2 batteries. In this sense, rolledup nano structured materials can be expected to improve the energy den sity, life cycle, and rate capability of lithiumbased batteries.…”
mentioning
confidence: 99%