2001
DOI: 10.1109/55.902829
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Large periphery high-power AlGaN/GaN metal-oxide-semiconductor heterostructure field effect transistors on SiC with oxide-bridging

Abstract: We report on AlGaN/GaN metal oxide semiconductor heterostructure field effect transistor (HFET) over SiC substrates with peripheries from 0.15 to 6 mm. These multigate devices with source interconnections were fabricated using a novel oxide-bridging approach. The saturation current was as high as 5.1 A for a 6 mm wide device with a gate leakage of 1 A/cm 2 for 1.5 m gate length in a 5 m source-drain opening. The cutoff frequency of around 8 GHz was practically independent of the device periphery. Large-signal … Show more

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Cited by 88 publications
(34 citation statements)
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“…It was thus nearly the same as what was previously reported for a MOSHFET. 9 This gate leakage current improvement was obtained while maintaining excellent dc and rf performance and high temperature stability.…”
mentioning
confidence: 83%
See 1 more Smart Citation
“…It was thus nearly the same as what was previously reported for a MOSHFET. 9 This gate leakage current improvement was obtained while maintaining excellent dc and rf performance and high temperature stability.…”
mentioning
confidence: 83%
“…1 was grown on a sapphire substrate using low-pressure metalorganic chemical vapor deposition ͑MOCVD͒. A device fabrication procedure similar to that reported earlier [7][8][9] was then used. Three sets of devices with identical geometry ͑gate length 1 m, source-drain opening 5 m, gate width 100 m͒ were fabricated on the same wafer.…”
mentioning
confidence: 99%
“…Furthermore, a maximum current of more than 5 A from a single-multigate on-wafer MOSH-FET was also measured and reported recently. 3 These extremely high channel currents in conjunction with breakdown voltages above 100 V, suggest the possibility of obtaining record high microwave output powers in GaNAlGaN field-effect transistors ͑FETs͒. A maximum rf output power in a class-A amplifier mode should be about ͑ 1.3A/mm͒100V/8ϭ16.25 w/mm for MOSHFETs and about ͑ 0.7A/mm͒100V/8ϭ8.75 w/mm for HFETs.…”
Section: Mechanism Of Radio-frequency Current Collapse In Gan-algan Fmentioning
confidence: 99%
“…͑i͒ Since the gate leakage current in MOSHFETs is about 4-6 orders less than that in HFETs, 3 the gate leakage current as the mechanism responsible for current collapse can be ruled out. Also, since the surface conditions are quite different for HFETs and MOSHFETs, we believe that surface states in the source-gate-drain openings do not contribute significantly to the current collapse.…”
Section: Mechanism Of Radio-frequency Current Collapse In Gan-algan Fmentioning
confidence: 99%
“…For this study, the MOSHFET devices fabricated and reported earlier [10] were used. The devices with the gate length of 1 m were fabricated over insulating SiC substrates.…”
Section: Moshfet Rf Switch Characteristicsmentioning
confidence: 99%