Large-scale initiated chemical vapor deposition of poly(glycidyl methacrylate) thin films

The techniques of initiated chemical vapor deposition (iCVD) and oxidative chemical vapor deposition (oCVD) enable the fabrication of chemically well‐defined thin polymeric films on complex objects with micro‐ and nano‐scale features. By depositing polymers from the vapor phase, many wetting and solution effects are avoided, and conformal films can be created. In iCVD, a variant of hot filament CVD, the deposition rate is enhanced and chemical functionalities of the polymers' constituents are maintained by including a thermally labile initiator in the feed stream. Due to the low energy required when using an initiator, delicate substrates can be coated. In oCVD, infusible, electrically conductive films are formed directly on the substrate of interest as the oxidant and monomer are introduced into the reactor simultaneously. This Feature Article provides an overview of the work that has been done to develop iCVD and oCVD into platform technologies. Relevant background, fundamentals, and applications will be discussed.

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“…Successful deposition of iCVD has been demonstrated in semi-continuous roll-to-roll reactor having a 300 mm width. [66] …”

Section: Kinetic Modeling Of the Icvd Processmentioning

confidence: 99%

Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD

Tenhaeff

Gleason

2008

Adv Funct Materials

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308

294

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“…In particular, these coatings may be applied on the latest salt-rejecting layers, [15-17] which resist exposure to chlorine, providing a path towards solving the desalination industry's bottleneck of the susceptibility of TFC-RO membranes to oxidative damage by chlorine. The surface treatment is benign, easily scalable [33] and compatible with the infrastructure in membrane industry, [2] which gives rise to a stable, non-toxic and inexpensive ultrathin coating. The good fouling resistance and chlorine resistance of this coating can help eliminate the most energy- and chemical-intensive step (pretreatment of seawater) in a RO desalination plant, [2] and reduce the environmental impacts of brine discharge.…”

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confidence: 99%

Synergistic Prevention of Biofouling in Seawater Desalination by Zwitterionic Surfaces and Low‐Level Chlorination

et al. 2013

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“…79 Dimensional analysis has been used to scale up a CVD process for dielectric materials from a small batch reactor to a 300-mm wide roll-to-roll system in which the substrate moved at speeds between 20 and 60 mm min À1 . 80 Using similar strategies, the scale-up and transition to rollto-roll processing of CVD processes for conjugated polymers is anticipated because the flow rates and pressures used are in a similar range. A primary challenge is the uniform spatial delivery of monomers and oxidants as these often have relatively low volatility.…”

Section: Scalabilitymentioning

confidence: 99%

Vapor phase oxidative synthesis of conjugated polymers and applications

Bhattacharyya

Howden

Borrelli

et al. 2012

J Polym Sci B Polym Phys

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116

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Since their discovery, electrically conductive polymers have gained immense interest both in the fields of basic and applied research. Despite their vast potential in the fabrication of efficient, flexible, and low-cost electronic and optoelectronic devices, they are often difficult to process by wetchemical methods due to their very low to poor solubility in organic solvents. The use of vapor-based synthetic routes, in which conductive polymers can be synthesized and deposited as a thin film directly on a substrate from the vapor phase, provides many unique advantages. This article discusses oxidative vapor deposition processes, primarily vapor phase polymerization and oxidative chemical vapor deposition, of conjugated polymers and their applications. The mild operating conditions (near room temperature processing) allow conformal and functional coatings of conjugated polymers on delicate substrates.

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Large-scale initiated chemical vapor deposition of poly(glycidyl methacrylate) thin films

Cited by 84 publications

References 21 publications

Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD

Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD

Synergistic Prevention of Biofouling in Seawater Desalination by Zwitterionic Surfaces and Low‐Level Chlorination

Vapor phase oxidative synthesis of conjugated polymers and applications

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