Large‐Scale Synthesis of Water Dispersible Ceria Nanocrystals by a Simple Sol–Gel Process and Their Use as a Chemical Mechanical Planarization Slurry

Abstract

Ceria nanocrystals with a cube shape were synthesized from the hydrolytic sol–gel reaction of cerium salt in the presence of oleylamine. The overall synthetic process is very simple and readily applicable to the large‐scale synthesis of tens of grams of product in a single reaction in air. These ceria nanocrystals are readily dispersible in aqueous media without the addition of any extra dispersing agent. The aqueous dispersion of the ceria nanocrystals was successfully used as a chemical mechanical polishing slurry, and it exhibited high removal selectivity between silicon oxide and silicon nitride at pH 7.(© Wiley‐VCH Verlag GmbH & Co. KGaA, 69451 Weinheim, Germany, 2008)

Synthesis of CeO2 nanosheets with a room temperature ionic liquid assisted method

“…2(a) and 2(b)). The similar morphology was reported in the hydrothermal process at 265 and 180 ℃ by using oleylamine and polyvinyl pyrrolidone as surfactants [12,13], indicating that RTIL assisted method is a low-cost and efficient approach to synthesize CeO 2 nanocubes. The samples obtained in other three RTILs show nanosheet morphology (Figs.…”

Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP

“…7 A lot of controversy exists around the effect of the particle size and concentration of slurry on polishing. 11,12 Though few reports are available on the effect of the pH, 11 slurry consistency 7 and particle size, 9,22 no detailed study was carried out on the nanoabrasive morphology dependent polishing and mechanism of glass polishing/ removal using nanoceria. 12 Jindal et al evaluated a mixed abrasive slurry containing alumina/ceria particles in dielectric CMP performance at a slurry pH of 4 and demonstrated an excellent selectivity of oxide over nitride as well as very low rms surface roughness values of $1 nm, making them attractive candidates for the shallow trench isolation (STI) CMP process.…”

Antibacterial Activity of Polymer Coated Cerium Oxide Nanoparticles

“…Cerium oxide nanoparticles (CeO 2 NPs) are amongst the most widely used rare earth compound finding applications in industrial and commercial products. The industrial applications includes its uses as a polishing agents [1] , ultraviolet absorbing compound in sunscreen [2] , solid electrolytes in solid oxide fuel cells [3] , as a fuel additive to promote combustion and in automotive exhaust catalyst [4] . However, it is in the biomedical industry CeO 2 NPs is gaining much attention because of their antioxidant properties [5] .…”