Laser ablation of aryltriazene photopolymer films: Effects of polymer structure on ablation properties

Fardel, Romain; Feurer, Pascal; Lippert, Thomas; Nagel, Matthias; Nüesch, Frank; Wokaun, Alexander

doi:10.1016/j.apsusc.2007.08.082

Cited by 23 publications

(14 citation statements)

References 23 publications

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“…From front-side-ablation depth measurements of TP, a single 308 nm pulse of 60 mJ/cm 2 is enough to ablate 100 nm TP. More than 150 mJ/cm 2 is required to ablate 300 nm TP [29]. This explains the general trend of successful transfer at higher fluences for a greater TP DRL thickness.…”

Section: Triazene Drl Thickness Comparisonmentioning

confidence: 62%

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Improved laser-induced forward transfer of organic semiconductor thin films by reducing the environmental pressure and controlling the substrate–substrate gap width

et al. 2011

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Laser-induced forward transfer (LIFT) has been investigated for bilayer transfer material systems: silver/ organic film (Alq 3 or PFO). The LIFT process uses an intermediate dynamic release layer of a triazene polymer. This study focuses on the effect of introducing a controlled donor-receiver substrate gap distance and the effect of doing the transfer at reduced air pressures, whilst varying the fluence up to ∼200 mJ/cm 2 . The gap between 'in-contact' substrates has been measured to be a minimum of 2-3 µm. A linear variation in the gap width from 'in contact' to 40 µm has been achieved by adding a spacer at one side of the substrate-substrate sandwich. At atmospheric pressure, very little transfer is achieved for Alq 3 , although PFO shows some signs of successful doughnut transfer (with a large hole in the middle) in a narrow fluence range, at gaps greater than 20 µm. For the transfer of Ag/PFO bilayers at atmospheric pressure, the addition of a PFO layer onto the receiver substrate improved the transfer enormously at smaller gaps and higher fluences. However, the best transfer results were obtained at reduced pressures where a 100% transfer success rate is obtained within a certain fluence window. The quality of the pixel morphology at less than 100 mbar is much higher than at atmospheric pressure, particularly when the gap width is less than 20 µm. These results show the promise of LIFT for industrial deposition processes where a gap between the substrates will improve the throughput.

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Section: Triazene Drl Thickness Comparisonmentioning

confidence: 62%

“…From front-side-ablation studies, it is known that around 80 mJ/cm 2 is required to fully ablate 190 nm TP [28,29]. This means that the triazene may not be completely decomposed until a fluence of up to 80 mJ/cm 2 , and possibly even above it.…”

Section: Discussionmentioning

confidence: 99%

Improved laser-induced forward transfer of organic semiconductor thin films by reducing the environmental pressure and controlling the substrate–substrate gap width

et al. 2011

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“…For comparison 1 µ m thick ZnO films on top of triazene polymer (TP) [4], as a DRL and 1 µm thick ZnO samples without any prior machining were also prepared and LIFTed. Single pulses (800 nm, 150 fs) from a commercial Ti:sapphire femtosecond laser were used to print micro-pellets of ZnO onto silicon and plastic substrates (the receiver) at a donor-receiver separation of 1 µm, using Mylar spacers.…”

Section: Experiments and Resultsmentioning

confidence: 99%

“…To avoid this problem a sacrificial layer (metallic or polymer) can be introduced between the donor and the carrier substrate in a complementary LIFT technique called the dynamic release layer (DRL)-LIFT technique [2]. However there are issues of post transfer contamination with the residual DRL [3], or chemical and thermal sensitivity of the DRL material [4]. Most importantly the basic problem of the ripping and shearing of the donor film at the boundary of the illuminated zone still persists in DRL-LIFT that result in deposits with rough edges, as well as unwanted debris present on the receiver.…”

Section: Introductionmentioning

confidence: 99%

Laser-Induced Forward Transfer of Pre-Machined Donor Films

Kaur

Feinaeugle

Banks

et al. 2011

CLEO:2011 - Laser Applications to Photonic Applications

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“…Comparing the transfers of SnO 2 NP transferred with one pulse (upper row) to a two pulse transfer (lower row) shows that pixels only transfer as a whole for two laser pulses with an optimal transfer fluence of about 50-100 mJ/cm 2 . From [23], it is known that the front side ablation rate of TP for 85 mJ/cm 2 is about 200 nm, which is in the range of the optimal transfer fluence. Therefore, we can assume that the TP is decomposed after the first laser pulse.…”

Section: Optimal Transfer Conditionmentioning

confidence: 99%

Laser induced forward transfer of SnO2 for sensing applications using different precursors systems

et al. 2012

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This paper presents the transfer of SnO 2 by laser induced forward transfer (LIFT) for gas sensor applications. Different donor substrates of SnO 2 with and without triazene polymer (TP) as a dynamic release layer were prepared. Transferring these films under different conditions were evaluated by optical microscopy and functionality. Transfers of sputtered SnO 2 films do not lead to satisfactory results and transfers of SnO 2 nanoparticles are difficult. Transfers of SnO 2 nanoparticles can only be achieved when applying a second laser pulse to the already transferred material, which improves the adhesion resulting in a complete pixel. A new approach of decomposing the transfer material during LIFT transfer was developed. Donor films based on UV absorbing metal complex precursors namely, SnCl 2 (acac) 2 were prepared and transferred using the LIFT technique. Transfer conditions were optimized for the different systems, which were deposited onto sensor-like microstructures. The conductivity of the transferred material at temperatures of about 400 • C are in a range usable for SnO 2 gas sensors. First sensing tests were carried out and the transferred material proved to change conductivity when exposed to ethanol, acetone, and methane.

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Laser ablation of aryltriazene photopolymer films: Effects of polymer structure on ablation properties

Cited by 23 publications

References 23 publications

Improved laser-induced forward transfer of organic semiconductor thin films by reducing the environmental pressure and controlling the substrate–substrate gap width

Improved laser-induced forward transfer of organic semiconductor thin films by reducing the environmental pressure and controlling the substrate–substrate gap width

Laser-Induced Forward Transfer of Pre-Machined Donor Films

Laser induced forward transfer of SnO2 for sensing applications using different precursors systems

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