2014
DOI: 10.1007/s00170-014-6625-6
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Laser ablation of silicon in water under different flow rates

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Cited by 59 publications
(40 citation statements)
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“…Thus, the water film should be thick enough to facilitate the particles flushing and workpiece cooling, but it should not be too thick to cause a significant absorption of laser intensity in water. Based on several reports [3][4][5][6]14,15], the water layer thickness applied in the underwater laser ablation can range from 0.5 to 4 mm depending on the laser wavelength and workpiece materials being cut. Using a thicker water layer is, however, possible as long as higher laser energy is applied to the process.…”
Section: Laser Ablation In a Thin-flowing Water Layermentioning
confidence: 99%
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“…Thus, the water film should be thick enough to facilitate the particles flushing and workpiece cooling, but it should not be too thick to cause a significant absorption of laser intensity in water. Based on several reports [3][4][5][6]14,15], the water layer thickness applied in the underwater laser ablation can range from 0.5 to 4 mm depending on the laser wavelength and workpiece materials being cut. Using a thicker water layer is, however, possible as long as higher laser energy is applied to the process.…”
Section: Laser Ablation In a Thin-flowing Water Layermentioning
confidence: 99%
“…4(b). The water layer of 2 mm for the former case was selected as per the applicable range of 1-3 mm suggested by many studies [1,4,5,20]. The results showed that the use of flowing water method can cause a cleaner cut surface and a better edge quality than processing in still water.…”
Section: Comparison Between Still Water and Flowing Water Approachesmentioning
confidence: 99%
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