Conference on Lasers and Electro-Optics 2017
DOI: 10.1364/cleo_si.2017.sm3k.4
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Laser Annealing of Low Temperature Deposited Silicon Waveguides

Abstract: Abstract:We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.

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(1 citation statement)
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“…Owing to the versatility of laser processing, there are a number of research groups using such laser treatments to modify the optoelectronic and microstructural properties of semiconductor optical waveguides [11,34,[36][37][38][39][40][41]. The fine control of the processing parameters, compared to rapid oven or photothermal [42] annealing, has led to significant improvements and control of their properties.…”
Section: Laser Processingmentioning
confidence: 99%
“…Owing to the versatility of laser processing, there are a number of research groups using such laser treatments to modify the optoelectronic and microstructural properties of semiconductor optical waveguides [11,34,[36][37][38][39][40][41]. The fine control of the processing parameters, compared to rapid oven or photothermal [42] annealing, has led to significant improvements and control of their properties.…”
Section: Laser Processingmentioning
confidence: 99%