Laser assisted fabrication of micro-lens array and characterization of their beam shaping property

Sohn, Ik-Bu; Choi, Hun-Kook; Noh, Young‐Chul; Kim, Jong-Yeol; Ahsan, Md. Shamim

doi:10.1016/j.apsusc.2019.02.083

Cited by 67 publications

(24 citation statements)

References 27 publications

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“…High cost due to expensive femtosecond laser [11,12] The most commonly nonmechanical methods contain reactive ion etching [8], photolithography [10], and femtosecond direct writing technology [11,12]. However, these methods are restricted by manufacturing with expensive devices, particular materials, and time-consuming production procedures [13,14].…”

Section: High Accuracy and Resolutionmentioning

confidence: 99%

“…However, the fabrication of a CMA with complex features brings huge challenges to optical applications. Various techniques for manufacturing CMAs [5][6][7][8][9][10][11][12][13][14][15][16][17][18] are still being developed. The manufacturing techniques can be categorized into nonmechanical and mechanical methods based on the properties of material removal.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Zhang

Yao

et al. 2022

Applied Sciences

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Cylindrical microlens array (CMA) is applied widely in imaging, sensing, and laser machining fields. Among the many techniques for machining CMA, moulding is considered a mass-production method with low-cost and good accuracy. Aimed at the present problems in the machining of CMA moulds, which include low processing efficiency and the prediction of the surface topography, this paper focused on the fabrication of CMA on RB-SiC moulds by precision grinding with micro-abrasive water jet (MAWJ) textured diamond wheels. The combined rough–fine grinding strategy for ceramic mould materials was proposed. The grinding experiments of CMA were carried out. The ultra-precision grinding method was optimized to obtain high shape accuracy and a high-quality surface of RB-SiC moulds. It was found that by using MAWJ-textured diamond wheels, the profile error in the peak-to-valley value (PV) of the CMA moulds can be further reduced to 6.7 μm by using the combined rough–fine strategy grinding process.

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Section: High Accuracy and Resolutionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Zhang

Yao

et al. 2022

Applied Sciences

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“…A CMLA with 100% fill-factor can not only collect the maximum amount of incident light and improve the signal-to-noise ratio but also effectively avoid the stray-light effect, which leads to an unnecessary diffraction effect. There are some fabrication strategies for CMLAs, such as the spatially constrained thermal reflow, CO 2 laser-assisted reshaping technique, and femtosecond laser one-step direct-writing . However, these solutions require either high-precision lithography molds or expensive devices such as lasers. , Although high fill-factor CMLAs can be prepared with a mold replication process, the surface profile of a lens is easily damaged when the mold is peeled off, and the manufacturing flexibility is poor.…”

Section: Introductionmentioning

confidence: 99%

3D Printing of a PDMS Cylindrical Microlens Array with 100% Fill-Factor

Zhang

Zhu

et al. 2021

ACS Appl. Mater. Interfaces

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Cylindrical microlens arrays (CMLAs) play a key role in many optoelectronic devices, and 100% fill-factor CMLAs also have the advantage of improving the signal-to-noise ratio and avoiding stray-light effects. However, the existing preparation technologies are complicated and costly, which are not suitable for mass production. Herein, we propose a simple, efficient, and lowcost manufacturing method for CMLAs with a high fill-factor via the electric-field-driven (EFD) microscale 3D printing of polydimethylsiloxane (PDMS). By adjusting the printing parameters, the profile and the fill-factor of the CMLAs can be controlled to improve their optical performance. The optical performance test results show that the printed PDMS CMLAs have good imageprojecting and light-diffraction properties. Using the two printing modes of this EFD microscale 3D-printing technology, a cylindrical dual-microlens array with a double-focusing function is simply prepared. At the same time, we print a series of specially shaped microlenses, proving the flexible manufacturing capabilities of this technology. The results show that the prepared CMLAs have good morphology and optical properties. The proposed method may provide a viable route for manufacturing large-area CMLAs with 100% fill-factor in a very simple, efficient, and low-cost manner.

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“…Microlens arrays (MLAs) and MLA-based artificial compound eyes (ACEs) play a key role in advanced micro-optical systems (Pan et al, 2007 ; Song et al, 2013 ; Gorzelak et al, 2014 ; Petsch et al, 2016 ; Lin et al, 2018 ). By taking advantages of small size, high integration, and striking optical capability, MLAs and ACEs are widely applied in light-field regulation (Deng et al, 2014 ; Wei et al, 2018 ; Zhou et al, 2018 ; Sohna et al, 2019 ), fiber coupling (Elsherif et al, 2019 ; Liu et al, 2019 ; Orth et al, 2019 ), lab-on-chip devices (Fei et al, 2011 ; Lv et al, 2016 ; Vespini et al, 2016 ), biochemical observation (Ma et al, 2014 ; Holzner et al, 2018 ), laser microfabrication (Bekesi et al, 2010 ; Li et al, 2020 ), solar cells (Chen Y. et al, 2013 ), sensors (Zanella et al, 2020 ), three-dimensional imaging (Li et al, 2016 ; Kim et al, 2019 ; Zhang et al, 2019 ; Joo et al, 2020 ; Qin et al, 2020 ; Zhao et al, 2020 ), and light extraction (Shin et al, 2018 ; Zhou et al, 2019a , b ). However, the normal use of the MLA is usually restricted by many limitations.…”

Section: Introductionmentioning

confidence: 99%

Mini-Review on Bioinspired Superwetting Microlens Array and Compound Eye

et al. 2020

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Microlens arrays (MLAs) and MLA-based artificial compound eyes (ACEs) are the important miniaturized optical components in modern micro-optical systems. However, their optical performance will seriously decline once they are wetted by water droplets (such as fog, dew, and rain droplets) or are polluted by contaminations in a humid environment. In this mini-review, we summarize the research works related to the fabrication of superwetting MLAs and ACEs and show how to integrate superhydrophobic and superoleophobic microstructures with an MLA. The fabrication strategy can be split into two categories. One is the hybrid pattern composed of the MLA domain and the superwetting domain. Another is the direct formation of superwetting nanostructures on the surface of the microlenses. The superhydrophobicity or superoleophobicity endows the MLAs and ACEs with liquid repellence and self-cleaning function besides excellent optical performance. We believe that the superwetting MLAs and ACEs will have significant applications in various optical systems that are often used in the humid or liquid environment.

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Laser assisted fabrication of micro-lens array and characterization of their beam shaping property

Cited by 67 publications

References 27 publications

Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

3D Printing of a PDMS Cylindrical Microlens Array with 100% Fill-Factor

Mini-Review on Bioinspired Superwetting Microlens Array and Compound Eye

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