Laser-Based Sensing, Measurement, and Misalignment Control of Coupled Linear and Angular Motion for Ultrahigh Precision Movement

Clark, Leon; Shirinzadeh, Bijan; Tian, Yanling; Oetomo, Denny

doi:10.1109/tmech.2014.2301824

Cited by 51 publications

(17 citation statements)

References 40 publications

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“…A tracking methodology has been proposed for the measurement of three DOF planar motion in previous research [26]. It utilises a laser interferometry-based sensing technique for measurement of motion for the two linear axes, and a vision-based scheme for the angular axis.…”

Section: Pose Measurement Methodologymentioning

confidence: 99%

“…Attached to the shaft of the motor is an inductive angle encoder possessing a resolution of 2.13 μrad. As hysteresis is observed between the inductive encoder output and the actual stage rotation, the measurement of the base's rotation, , is performed directly with a vision-based technique, to be described in Section 2.2.Misalignment of the measurement beams, , is detected by a Position Sensitive Diode (PSD) based detection unit, as described in [26]. The misalignment sensor employs a plano-concave (PCV) lens to amplify the deflection of the measurement beam, together with a convex (CX) lens to ensure a high signal-to-noise ratio.…”

Section: Experimental Apparatusmentioning

confidence: 99%

“…In previous research, the authors have proposed a novel tracking technique to provide position measurement of coupled linear and angular motions [26]. In implementing such a technique, pose output is determined from the combination of measurements from multiple sub-systems.…”

Section: Introductionmentioning

confidence: 99%

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The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

Clark¹,

Shirinzadeh²,

Tian³

et al. 2014

Meas. Sci. Technol.

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This paper presents an analysis of the tracking performance of a planar three Degrees of Freedom (DOF) flexure-based mechanism for micro/nano manipulation, utilising a tracking methodology for the measurement of coupled linear and angular motions. The methodology permits trajectories over a workspace with large angular range through the reduction of geometric errors. However, when combining this methodology with feedback control systems, the accuracy of performed manipulations can only be stated within the bounds of the uncertainties in measurement. The dominant sources of error and uncertainty within each sensing subsystem are therefore identified, which leads to a formulation of the measurement uncertainty in the final system outputs, in addition to methods of reducing their magnitude. Specific attention is paid to the analysis of the vision-based subsystem utilised for the measurement of angular displacement. Furthermore, a feedback control scheme is employed to minimise tracking errors, and the coupling of certain measurement errors is shown to have a detrimental effect on the controller operation. The combination of controller tracking errors and measurement uncertainty provides the bounds on the final tracking performance.

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Section: Pose Measurement Methodologymentioning

confidence: 99%

Section: Experimental Apparatusmentioning

confidence: 99%

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The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

Clark¹,

Shirinzadeh²,

Tian³

et al. 2014

Meas. Sci. Technol.

Self Cite

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“…On one hand, additional sensors may be used to provide an outer-loop control (the often used inner-loop feedback one is based on internal sensors of the stages) [12]. However, a key limitation is the complexity of integrating sensors able to measure a relative position with required range, resolution, bandwidth and number of DoF (Degree-of-Freedom) [13].…”

Section: Introductionmentioning

confidence: 99%

Calibration of Nanopositioning Stages

2015

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Accuracy is one of the most important criteria for the performance evaluation of microand nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications. However, their positioning accuracy and repeatability are not well known and difficult to guarantee, which induces many drawbacks for many applications. For example, in the mechanical characterisation of biological samples, it is difficult to perform several cycles in a repeatable way so as not to induce negative influences on the study. It also prevents one from controlling accurately a tool with respect to a sample without adding additional sensors for closed loop control. This paper aims at quantifying the positioning repeatability and accuracy based on the ISO 9283:1998 standard, and analyzing factors influencing positioning accuracy onto a case study of 1-DoF (Degree-of-Freedom) nanopositioning stage. The influence of thermal drift is notably quantified. Performances improvement of the nanopositioning stage are then investigated through robot calibration (i.e., open-loop approach). Two models (static and adaptive models) are proposed to compensate for both geometric errors and thermal drift. Validation experiments are conducted over a long period (several days) showing that the accuracy of the stage is improved from typical micrometer range to 400 nm using the static model and even down to 100 nm using the adaptive model. In addition, we extend the 1-DoF calibration to multi-DoF with a case study of a 2-DoF nanopositioning robot. Results demonstrate that the model efficiently improved the 2D accuracy from 1400 nm to 200 nm.

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“…For instance, the influence of a capacity sensor's tilts on its output was analyzed in [15]. Recently, Clark et al proposed counter-rotating the entire mechanism to compensate for the misalignment of the laser beams to improve the measurement accuracy of the laser interferometer [16]. Based on the above analyses, methods for high-precision measurement of pure linear or pure angular motions are many, whereas methods for the high-precision measurement of the coupled linear and angular motions are rare.…”

Section: Introductionmentioning

confidence: 99%

A novel method for measuring the coupled linear and angular motions of XYΘ-type flexure-based manipulators

Qin

Zhao

2015

2015 IEEE International Conference on Robotics and Automation (ICRA)

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For XYΘ-type flexure-based manipulators with nanometer accuracy, the coupled linear/angular motions of the end effector cause unwanted misalignments to the measurement system, leading to measurement error or even measurement failure. This paper proposes an indirect measuring method for such manipulators, where the 3-PRR topology is adopted to kinematically transfer the coupled motions of the end effector to the linear motions of three prismatic joints. Unlike the other XYΘ manipulators, three linear position sensors are used to measure the linear motions of the prismatic joints, not the coupled motions of the end effector. Accordingly, the position and orientation of the end effector can be obtained via the forward kinematics. This indirect method aims to eliminate the influence of the coupled motions of the end effector on the measurement system, and to guarantee the accuracies and effectiveness of the sensors' outputs. An XYΘ flexure-based manipulator is developed following this method. The design and kinematics modeling is presented, and the effectiveness of this method is computationally verified. The future work will focus on the experimental verification of this method.

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Laser-Based Sensing, Measurement, and Misalignment Control of Coupled Linear and Angular Motion for Ultrahigh Precision Movement

Abstract: Denny. (2015) Laser-based sensing, measurement, and misalignment control of coupled Linear and angular motion for ultrahigh precision movement. IEEE/ASME Transactions on Mechatronics, 20 (1). pp. 84-92. Permanent WRAP url:

Cited by 51 publications

References 40 publications

The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

Calibration of Nanopositioning Stages

A novel method for measuring the coupled linear and angular motions of XYΘ-type flexure-based manipulators

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Laser-Based Sensing, Measurement, and Misalignment Control of Coupled Linear and Angular Motion for Ultrahigh Precision Movement

Abstract: Denny. (2015) Laser-based sensing, measurement, and misalignment control of coupled Linear and angular motion for ultrahigh precision movement. IEEE/ASME Transactions on Mechatronics, 20 (1). pp. 84-92. Permanent WRAP url:

Cited by 51 publications

References 40 publications

The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

Calibration of Nanopositioning Stages

A novel method for measuring the coupled linear and angular motions of XY&#x0398;-type flexure-based manipulators

Contact Info

Product

Resources

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A novel method for measuring the coupled linear and angular motions of XYΘ-type flexure-based manipulators