Laser Chemical Processing (LCP)—A versatile tool for microstructuring applications

Kray, D.; Fell, Andreas; Hopman, Sybille; Mayer, K.; Willeke, G.; Glunz, Stefan W.

doi:10.1007/s00339-008-4723-8

Cited by 70 publications

(41 citation statements)

References 4 publications

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“…To overcome poor adhesion of plated metal layers on silicon, the ablation of the ARC with a 355 nm ps-laser (compare [11]) is the best option over other processes such as LCP (laser chemical processing, compare [18]), wet chemical ablation, and others ( fig. 7) [4].…”

Section: Baseline Processmentioning

confidence: 99%

Design Rules for Solar Cells with Plated Metallization

et al. 2015

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This work deals with requirements regarding the solar cell process that allow or facilitate the introduction of fabrication processes for front side metallization. By taking experience with plating on solar cells both from the literature and from practical lab work, design rules for the solar cell and the plating process have been derived. Regarding the surface texture, small features (e.g., random pyramids < 5 μm) have been found beneficial for plating processes both on printed seed layers and directly on silicon. A dense, pinhole-free anti-reflective coating suppresses so-called ghost plating as well as careful handling in production. Shunting, which is possible for laser edge isolation can be prevented by applying wet chemical edge isolation. An adjusted soldering process which brings in high energy within a short time is recommended. Infrared or inductive soldering are ideal for the connection of plated surfaces with ribbon. For plating on paste it is recommended that using plating electrolytes with pH>2 result in a good adhesion of the seed layer on the silicon surface. Further the glass content in the silver paste and the size of the glass particles have a big influence on the adhesion. A high glass content and small particles are beneficial for a following plating process. For direct plating on silicon an ablation of the ARC with a 355 nm ps-laser is the best option for adhesion

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Section: Baseline Processmentioning

confidence: 99%

Design Rules for Solar Cells with Plated Metallization

et al. 2015

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“…Liquid dopant sources can be used as well. In this case the wafer is immersed in organic solutions [22] or Laser Chemical Processing (LCP) can be done [23]. Efficiencies exceeding 20% were achieved by Kray et al [24] using the latter approach, although required the use of microelectronics grade processing such as photolithographically defined Ti/Pd/Ag metal contacts and FZ wafers.…”

Section: Introductionmentioning

confidence: 98%

Influence of laser power on the properties of laser doped solar cells

Hameiri

Mai

Puzzer

et al. 2011

Solar Energy Materials and Solar Cells

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“…In this process, a selective material removal is based on laser-induced thermochemical reactions between an etchant, for example 5-molar phosphoric acid (H 3 PO 4 ), and a metallic material [8]. It can be applied to all metals with a material specific passivation layer, which protects the workpiece against a chemical dissolution in the acid at room temperature.…”

Section: Introductionmentioning

confidence: 99%

A quality controlled laser-chemical process for micro metal machining

Zhang

Goch

2015

Prod. Eng. Res. Devel.

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A laser-chemical process combines advantages of both laser ablation and electro-chemical machining and is used to produce free form micro forming tools. The desired geometry results from a sequence of overlapping removal paths with different cross section. Due to the high requirements of geometry accuracy and surface roughness, a three-level quality control system is developed for this process. Based on causal analysis between removal profile and process parameters a post-process controller designs the position and cross section for the removal paths. With an in situ quality control loop the deviation from the desired removal profile along the feed direction could be compensated by using a state observer and an interferometer. At an in-process level the required process parameters are real time observed and controlled.

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Laser Chemical Processing (LCP)—A versatile tool for microstructuring applications

Cited by 70 publications

References 4 publications

Design Rules for Solar Cells with Plated Metallization

Design Rules for Solar Cells with Plated Metallization

Influence of laser power on the properties of laser doped solar cells

A quality controlled laser-chemical process for micro metal machining

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