2012
DOI: 10.1016/j.ijleo.2011.07.030
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Laser cleaning of particle and grease contaminations on the surface of optics

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Cited by 43 publications
(23 citation statements)
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“…Surface contamination has long been recognized as a performance-limiting issue in many areas of technology including microelectronics [1], nuclear reactors [2,3], and optics [4][5][6]. While debris accumulation on optical surfaces is generally problematic because of light scattering, diffraction, and obscuration, the impact to performance takes on new dimensions when considering optics for high-power laser systems [7,8].…”
Section: Introductionmentioning
confidence: 99%
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“…Surface contamination has long been recognized as a performance-limiting issue in many areas of technology including microelectronics [1], nuclear reactors [2,3], and optics [4][5][6]. While debris accumulation on optical surfaces is generally problematic because of light scattering, diffraction, and obscuration, the impact to performance takes on new dimensions when considering optics for high-power laser systems [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…This nondestructive technique has been exploited since the early 1990s and remains an active area of research today [5,10,11]. The essential physics involves Van der Waals forces that are overcome by laser-driven thermal expansion and interfacial plasma pressure to remove particles.…”
Section: Introductionmentioning
confidence: 99%
“…Hsu and Lin (2006) investigated the removal mechanisms of contaminants in laser cleaning. Ye et al (2012) used the 1064 nm laser-induced plasma shockwave cleaning to remove SiO 2 particle contaminations on the K9 glass surface by properly controlling the laser parameters, and they reported that the removal ratio could reach above 95 %. Krüger et al (2008) reported the ability of laser pulse to remove unwanted particles and films of nano-size from the material surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…Recovery processes have been developed to remove oil from damaging areas. Laser technology has been introduced to oil removal from contaminated areas [4][5][6][7]. To achieve this cleaning concept, Q-switched Nd:YAG laser has been proposed as a new tool in oil removal [8][9][10].…”
Section: Introductionmentioning
confidence: 99%