1996
DOI: 10.3367/ufnr.0166.199601a.0003
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Laser control processes in solids

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Cited by 39 publications
(5 citation statements)
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“…This stress distribution can influence the motion of the impurities during the diffusion processes and the sharp distribution of the impurities that are observed during diffusion processes. For example, the sharp distribution of buried Ge layers in silicon [18] could be explained as the action of the field of stress as discussed above.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…This stress distribution can influence the motion of the impurities during the diffusion processes and the sharp distribution of the impurities that are observed during diffusion processes. For example, the sharp distribution of buried Ge layers in silicon [18] could be explained as the action of the field of stress as discussed above.…”
Section: Resultsmentioning
confidence: 99%
“…A standard TRIM (TRansport of Ions in Matter) program [16] was used to define both the ion-distribution function and the defectdistribution function. [17,18]) from ( 1) and ( 2), it can be seen that compressive stress dominates in the ion-implanted region. The integrated stress that is measured experimentally from the curvature measurements of the ion-implanted beam (by the cantilever technique) is defined as…”
Section: The Model Of Ion-induced Strain and Stressmentioning
confidence: 95%
“…Depending on the beam intensity and pulse duration, both reversible and irreversible matter states can be induced in a variety of inorganic materials (London et al, 2001;Hau-Riege, 2012). This is not surprising; indeed similar concepts have been extensively investigated in the field of high-power laser irradiation, where both thermal and non-thermal effects are currently exploited in many laser-based technological processes (Mirzoev et al, 1996;Liu et al, 1997).…”
Section: Introductionmentioning
confidence: 92%
“…где u i -компоненты вектора перемещений, σ i jкомпоненты тензора напряжений, = T − T 0 , T 0 -начальная температура среды, T -текущая температура, κ -коэффициент теплопроводности, ρ -плотность материала, S -энтропия единицы объема среды, следует добавить кинетические уравнения, описывающие изменение числа точечных дефектов в единице объема [1]:…”
Section: постановка задачиunclassified
“…При воздействии на материал лазерного излучения или потока частиц (например, при ионной имплантации) в нем создаются точечные дефекты (вакансии, межузлия) [1]. Прохождение интенсивной продольной акустической волны способствует изменению в областях растяжения и сжатия энергии активации образования точечных дефектов, приводя к их пространственному перераспределению.…”
Section: Introductionunclassified