Laser Direct Writing of Thick Hybrid Polymers for  Microfluidic Chips

Singh, Akanksha; Scotti, Gianmario; Sikanen, Tiina; Jokinen, Ville; Franssila, Sami

doi:10.3390/mi5030472

Cited by 23 publications

(8 citation statements)

References 16 publications

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“…With this system, we used the laser direct writing (LDW) method. LDW uses laser beam to create a controlled localized damage on the surface [ 22 ]. We designed the patterns by using a 2D CAD (AutoCAD, San Rafael, CA, USA), which has an advantage in that various patterns can be implemented in one step.…”

Section: Methodsmentioning

confidence: 99%

Fabrication of UV Laser-Induced Porous Graphene Patterns with Nanospheres and Their Optical and Electrical Characteristics

Lee

Jeong

et al. 2020

Materials

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Many studies have been conducted to fabricate unique structures on flexible substrates and to apply such structures to a variety of fields. However, it is difficult to produce unique structures such as multilayer, nanospheres and porous patterns on a flexible substrate. We present a facile method of nanospheres based on laser-induced porous graphene (LIPG), by using laser-induced plasma (LIP). We fabricated these patterns from commercial polyimide (PI) film, with a 355 nm pulsed laser. For a simple one-step process, we used laser direct writing (LDW), under ambient conditions. We irradiated the PI film at a defocused plane −4 mm away from the focal plane, for high pulse overlap rate. The effect of the laser scanning speed was investigated by FE-SEM, to observe morphological characterization. Moreover, we confirmed the pattern characteristics by optical microscope, Raman spectroscopy and electrical experiments. The results suggested that we could modulate the conductivity and structural color by controlling the laser scanning speed. In this work, when the speed of the laser is 20 mm/s and the fluence is 5.28 mJ/cm2, the structural color is most outstanding. Furthermore, we applied these unique characteristics to various colorful patterns by controlling focal plane.

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Section: Methodsmentioning

confidence: 99%

Fabrication of UV Laser-Induced Porous Graphene Patterns with Nanospheres and Their Optical and Electrical Characteristics

Lee

Jeong

et al. 2020

Materials

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“…Owing to the low cost of the materials and the straightforward microfabrication protocols, photolithography of polymer-based photoresists is often considered the most feasible approach for fabrication of high-resolution microfluidic devices. Organically modified ceramics (ORMOCERs) are a new class of organic-inorganic hybrid polymers that can be patterned by a variety of techniques, including ultraviolet (UV) embossing, UV laser ablation, and UV lithography in proximity mode [1,2,3,4]. They comprise of organic side chains attached to an inorganic siloxane backbone [1,2], which yields excellent chemical and thermal stability [5] and inherent resistance to protein fouling [6,7].…”

Section: Introductionmentioning

confidence: 99%

Metallization of Organically Modified Ceramics for Microfluidic Electrochemical Assays

et al. 2019

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Organically modified ceramic polymers (ORMOCERs) have attracted substantial interest in biomicrofluidic applications owing to their inherent biocompatibility and high optical transparency even in the near-ultraviolet (UV) range. However, the processes for metallization of ORMOCERs as well as for sealing of metallized surfaces have not been fully developed. In this study, we developed metallization processes for a commercial ORMOCER formulation, Ormocomp, covering several commonly used metals, including aluminum, silver, gold, and platinum. The obtained metallizations were systematically characterized with respect to adhesion (with and without adhesion layers), resistivity, and stability during use (in electrochemical assays). In addition to metal adhesion, the possibility for Ormocomp bonding over each metal as well as sufficient step coverage to guarantee conductivity over topographical features (e.g., over microchannel edges) was addressed with a view to the implementation of not only planar, but also three-dimensional on-chip sensing elements. The feasibility of the developed metallization for implementation of microfluidic electrochemical assays was demonstrated by fabricating an electrophoresis separation chip, compatible with a commercial bipotentiostat, and incorporating integrated working, reference, and auxiliary electrodes for amperometric detection of an electrochemically active pharmaceutical, acetaminophen.

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“…ORMOCER V R s are a new class of inorganic-organic hybrid polymers, which enable fast and simple microfabrication by UV-lithography and hold glass-like material properties after curing. 9,10 Beside lithography, ORMOCER V R s can also be patterned by UV embossing, 10 direct laser writing, 11 and ink-jet printing. 12 Thanks to their good biocompatibility, ORMOCER V R s are ideal for a variety of bioanalytical 10,13,14 and biomedical applications, including cell culturing 15,16 and cell migration assays, 17 tissue engineering, 18 and dentistry.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of concave micromirrors for single cell imaging via controlled over-exposure of organically modified ceramics in single step lithography

et al. 2017

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This work describes the fabrication of concave micromirrors to improve the sensitivity of fluorescence imaging, for instance, in single cell analysis. A new approach to fabrication of tunable round (concave) cross-sectional shaped microchannels out of the inorganic-organic hybrid polymer, Ormocomp, single step optical lithography was developed and validated. The concave micromirrors were implemented by depositing and patterning thin films of aluminum on top of the concave microchannels. The round cross-sectional shape was due to residual layer formation, which is inherent to Ormocomp upon UV exposure in the proximity mode. We show that it is possible to control the residual layer thickness and thus the curved shape of the microchannel cross-sectional profile and eventually the focal length of the micromirror, by simply adjusting the UV exposure dose and the distance of the proximity gap (to the photomask). In general, an increase in the exposure dose or in the distance of the proximity gap results in a thicker residual layer and thus an increase in the radius of the microchannel curvature. Under constant exposure conditions, the radius of curvature is almost linearly dependent on the microchannel aspect ratio, i.e., the width (here, 20-200 m) and the depth (here, 15-45m). Depending on the focal length, up to 8-fold signal enhancement over uncoated, round Ormocomp microchannels was achieved in single cell imaging with the help of the converging micromirrors in an epifluorescence microscopy configuration.

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Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

Cited by 23 publications

References 16 publications

Fabrication of UV Laser-Induced Porous Graphene Patterns with Nanospheres and Their Optical and Electrical Characteristics

Fabrication of UV Laser-Induced Porous Graphene Patterns with Nanospheres and Their Optical and Electrical Characteristics

Metallization of Organically Modified Ceramics for Microfluidic Electrochemical Assays

Fabrication of concave micromirrors for single cell imaging via controlled over-exposure of organically modified ceramics in single step lithography

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