Laser fabricated microchannels inside photostructurable glass-ceramic

Fernández-Pradas, J.M.; Serrano, D.; Serra, P.; Morenza, J.L.

doi:10.1016/j.apsusc.2008.08.099

Cited by 37 publications

(19 citation statements)

References 18 publications

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“…2). Concomitantly with the etch rate, their values slowly increase with laser pulse energy above 0.2 J, reaching maximum etch rate ratios of 58, similar to those obtained in the fabrication of microchannels in the laser incidence direction [10]. Fig.…”

Section: Resultssupporting

confidence: 82%

“…For the rest of conditions, the etch rate slowly increases with laser pulse energy from 35 to 41 m/min. The described cross-section shape rapidly appears after the first seconds under immersion in the 10%HF solution, and it continues growing by etching the microchannel wall at an etch rate of about 0.7 m/min which is similar to that found for non-irradiated material [10]. The corresponding etch rate ratios of modified Foturan versus non-irradiated Foturan can be then calculated (Fig.…”

Section: Resultssupporting

confidence: 60%

“…Excimer and Nd: YAG lasers with nanosecond pulses and UV wavelengths, as well as femtosecond pulsed lasers with infrared wavelengths have been used for Foturan microfabrication [5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

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3D features of modified photostructurable glass–ceramic with infrared femtosecond laser pulses

Fernández-Pradas

Serrano

Bosch

et al. 2011

Applied Surface Science

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a b s t r a c tThe exclusive ability of laser radiation to be focused inside transparent materials makes lasers a unique tool to process inner parts of them unreachable with other techniques. Hence, laser direct-write can be used to create 3D structures inside bulk materials. Infrared femtosecond lasers are especially indicated for this purpose because a multiphoton process is usually required for absorption and high resolution can be attained. This work studies the modifications produced by 450 fs laser pulses at 1027 nm wavelength focused inside a photostructurable glass-ceramic (Foturan ® ) at different depths. Irradiated samples were submitted to standard thermal treatment and subsequent soaking in HF solution to form the buried microchannels and thus unveil the modified material. The voxel dimensions of modified material depend on the laser pulse energy and the depth at which the laser is focused. Spherical aberration and selffocusing phenomena are required to explain the observed results.

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Section: Resultssupporting

confidence: 82%

Section: Resultssupporting

confidence: 60%

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3D features of modified photostructurable glass–ceramic with infrared femtosecond laser pulses

Fernández-Pradas

Serrano

Bosch

et al. 2011

Applied Surface Science

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“…2.2, when femtosecond laser radiation is applied in transparent bulk dielectric material with relatively lower intensity, the etching rate for several materials would be modified due to laser radiation-induced photochemical reactions or radiation-induced structure changes. Thus, internal microstructures are able to be fabricated inside photosensitive glasses [41,[118][119][120], fused silica glass [34,52,[121][122][123][124], sapphire crystal [30,125], semiconductors [126], porous glass [35,127,128], and polymer materials [129] by a selective etching method.…”

Section: Liquid-assisted Femtosecond Laser Selective Etchingmentioning

confidence: 99%

Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Zheng

Chen

et al. 2015

Appl. Phys. A

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Potential applications for three-dimensional microstructure devices developed rapidly across numerous fields including microoptics, microfluidics, microelectromechanical systems, and biomedical devices. Benefiting from many unique fabricating advantages, internal manufacturing methods have become the dominant process for three-dimensional microstructure device manufacturing. This paper provides a brief review of the most common techniques of femtosecond laser three-dimensional internal manufacturing (3DIM). The physical mechanisms and representative experimental results of 3D manufacturing technologies based on multiphoton polymerization, laser modification, microexplosion and continuous hollow structure internal manufacturing are provided in details. The important progress in emerging applications based on the 3DIM technologies is introduced as well.

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“…Pradas et al [ 3 ] studied microchannels development using laser in photostructurable glass ceramic (Foturan) with subsequent heat treatment and chemical etching. Microchannels with round cross sections and similar apertures were fabricated on both sides of Foturan slides.…”

Section: Introductionmentioning

confidence: 99%

Microchannels Fabrication in Alumina Ceramic Using Direct Nd:YAG Laser Writing

et al. 2018

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Ceramic microchannels have important applications in different microscale systems like microreactors, microfluidic devices and microchemical systems. However, ceramics are considered difficult to manufacture owing to their wear and heat resistance capabilities. In this study, microchannels are developed in alumina ceramic using direct Nd:YAG laser writing. The laser beam with a characteristic pulse width of 10 µs and a beam spot diameter of 30 µm is used to make 200 µm width microchannels with different depths. The effects of laser beam intensity and pulse overlaps on dimensional accuracy and material removal rate have been investigated using different scanning patterns. It is found that beam intensity has a major influence on dimensional accuracy and material removal rate. Optimum parameter settings are found using grey relational grade analysis. It is concluded that low intensity and low to medium pulse overlap should be used for better dimensional accuracy. This study facilitates further understanding of laser material interaction for different process parameters and presents optimum laser process parameters for the fabrication of microchannel in alumina ceramic.

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Laser fabricated microchannels inside photostructurable glass-ceramic

Cited by 37 publications

References 18 publications

3D features of modified photostructurable glass–ceramic with infrared femtosecond laser pulses

3D features of modified photostructurable glass–ceramic with infrared femtosecond laser pulses

Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Microchannels Fabrication in Alumina Ceramic Using Direct Nd:YAG Laser Writing

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