2014
DOI: 10.1002/pip.2520
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Laser‐fired contact for n‐type crystalline Si solar cells

Abstract: Laser-fired contacts to n-type crystalline silicon were developed by investigating novel metal stacks containing Antimony (Sb). Lasing conditions and the structure of metals stacks were optimized for lowest contact resistance and minimum surface damage. Specific contact resistance for firing different metal stacks through either silicon nitride or p-type amorphous silicon was determined using two different models and test structures. Specific contact resistance values of 2-7 mΩcm 2 have been achieved. Recombin… Show more

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Cited by 26 publications
(7 citation statements)
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“…As an application of laser firing on a silicon heterojuction architecture with n-type bulk, it may be of interest to other groups working on industry-relevant fabrication techniques for IBC or SHJ-IBC architectures [7,8]. Complementary works on laser firing on IBC cells include n-type dopant sources such as POCl 3 , Sb, phosphorous doped silicon carbide (a-SiC x (n)) or phosphorous spin-on dopants [8,9,10,11].…”
Section: Introductionmentioning
confidence: 99%
“…As an application of laser firing on a silicon heterojuction architecture with n-type bulk, it may be of interest to other groups working on industry-relevant fabrication techniques for IBC or SHJ-IBC architectures [7,8]. Complementary works on laser firing on IBC cells include n-type dopant sources such as POCl 3 , Sb, phosphorous doped silicon carbide (a-SiC x (n)) or phosphorous spin-on dopants [8,9,10,11].…”
Section: Introductionmentioning
confidence: 99%
“…The capex associated with contact firing can be reduced for a traditional belt furnace process by increasing the throughput of the entire manufacturing process (the throughput of a belt furnace is just determined by the belt length). Belt furnace firing can also be replaced by laser-firing [53][54][55] or another more efficient furnace. 56,57 On the module level, capex can be reduced by eliminating the aluminum frame 27,58,59 and simplified tabbing and stringing of cells together.…”
Section: Papermentioning
confidence: 99%
“…The capex associated with contact firing can be reduced for a traditional belt furnace process by increasing the throughput of the entire manufacturing process (the throughput of a belt furnace is just determined by the belt length). Belt furnace firing can also be replaced by laser-firing [53][54][55] or another more efficient furnace. 56,57 On the module level, capex can be reduced by eliminating the aluminum frame 27,58,59 and simplified tabbing and stringing of cells together.…”
Section: View Article Onlinementioning
confidence: 99%