1989
DOI: 10.1117/12.960613
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Laser-Induced Damage To Silicon CCD Imaging Sensors

Abstract: Laser-induced morphological and electrical changes to silicon CCD devices have been studied. The devices were poly -silicon gate Time Delay Integrating (TDI) CCD arrays of 2048x96 elements. The laser source for these experiments was a Q-switched Nd:YAG laser at 1.06 µm with 10 ns pulses at a 10 Hz repetition rate focused to an approximately 400 gm spot radius. Single pulse and multiple pulse damage behavior was studied. Both CCD arrays and diagnostic structures from the wafer periphery were tested. The additio… Show more

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Cited by 13 publications
(11 citation statements)
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“…When the electrons accumulated in the capacitor reached a certain number, it will penetrate and overflow from the potential hill. Then the phenomenon of crosstalk will be appeared [7,8] . detecting precision, the detecting system must has a small field angle.…”
Section: Disturbance Of Ccdmentioning
confidence: 98%
“…When the electrons accumulated in the capacitor reached a certain number, it will penetrate and overflow from the potential hill. Then the phenomenon of crosstalk will be appeared [7,8] . detecting precision, the detecting system must has a small field angle.…”
Section: Disturbance Of Ccdmentioning
confidence: 98%
“…Over the past decade, laser systems have become more and more powerful, low-priced, and compact [1,2] . Intense laser radiation is increasingly becoming a hazard to electro-optical imaging sensors, since complementary metal-oxide semiconductor (CMOS) or charge-coupled device (CCD) imaging sensors are very sensitive to high-intensity light fluxes from lasers [3,4] . High-power lasers may temporarily disrupt image acquisition, or even damage the optical sensor by excessively illuminating the sensor.…”
Section: Introductionmentioning
confidence: 99%
“…The device didn't work properly when the leakage current reached 500 mJ/ cm2. When the energy density rises to 1 J/cm2, the device was seriously ablated [1][2][3] . In 1993, the group of C.Z.…”
Section: Introductionmentioning
confidence: 99%