1979
DOI: 10.1002/pssa.2210530136
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Laser light spot mapping of depletion in power semiconductor devices

Abstract: Using a light spot scanning technique surface depletion at semiconductor junctions may be mapped. Depletion widths measured in this way are in agreement with calculated values for simple geometries. The effects of positive and negative bevels in spreading surface depletion are in qualitative agreement with theoretical predictions. Glass passivation alters surface depletion in a manner strongly dependent on glass/silicon interface charge. A high negative charge induces a channel which may be pinched off at high… Show more

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Cited by 12 publications
(1 citation statement)
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“…in [j], the order of magiiitude for Q E H / q was 10" elementary charges per cm2 and no rallies for the conceiitrations of interface trap states D,, were given in that papers. Measurements of breakdown voltages a t glass-passivated diodes as a function of design and processing parameters in [Cij and light-spot scanning mapping of depleted regions in [7] gave only qualitative results concerning interface charges. The influence of additives (Na, F) on interface charge and device stability was investigated in C-V methods are extensively used for exploring electrical propel ties of semiconductor-insulator interfaces.…”
Section: Introductionmentioning
confidence: 99%
“…in [j], the order of magiiitude for Q E H / q was 10" elementary charges per cm2 and no rallies for the conceiitrations of interface trap states D,, were given in that papers. Measurements of breakdown voltages a t glass-passivated diodes as a function of design and processing parameters in [Cij and light-spot scanning mapping of depleted regions in [7] gave only qualitative results concerning interface charges. The influence of additives (Na, F) on interface charge and device stability was investigated in C-V methods are extensively used for exploring electrical propel ties of semiconductor-insulator interfaces.…”
Section: Introductionmentioning
confidence: 99%