Laser microfabrication and rotation of ship-in-a-bottle optical rotators

Matsuo, Shigeki; Kiyama, Satoshi; Shichijo, Y.; Tomita, Takuro; Hashimoto, Shuichi; Hosokawa, Yoichiroh; Masuhara, Hiroshi

doi:10.1063/1.2967872

Cited by 41 publications

(23 citation statements)

References 21 publications

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“…[21][22][23] The surface smoothness of the microchannels was improved by smaller-pitch line-to-line scanning and optimized postthermal annealing. To enhance their functionalities, some 1D to 3D glass microcomponents, including waveguides, [24][25][26] microrotators, 27 micromirrors, 23 and microlenses, 28 have been integrated into the channels. However, the FLAE method suffers from low fabrication precision, on the order of 10 mm, determined by the wet etching process.…”

Section: Introductionmentioning

confidence: 99%

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Niu

et al. 2015

Light Sci Appl

123

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The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1-5 mm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (.three times) focal length and imaging of the characters 'RIKEN' in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

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Section: Introductionmentioning

confidence: 99%

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Niu

et al. 2015

Light Sci Appl

123

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“…For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices [5][6][7]. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers [8,9], microvalves [10], and micropumps [11]. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications

Liao

Cheng

2014

Micromachines

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Abstract:The creation of complex three-dimensional (3D) fluidic systems composed of hollow micro-and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. However, it is by now still a formidable challenge to build 3D micro-and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. As a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision, spatially-selective, modification inside transparent materials through nonlinear optical absorption. In this paper, we demonstrate rapid fabrication of high-aspect-ratio micro-and/or nanofluidic structures with various 3D configurations by femtosecond laser direct writing in porous glass substrates. Based on this approach, we demonstrate several functional micro-and nanofluidic devices including a 3D passive microfluidic mixer, a capillary electrophoresis (CE) analysis chip, and an integrated micro-nanofluidic system for single DNA analysis. The possible mechanisms behind the formation of high-aspect-ratio micro-and nanochannels are also discussed. This technology offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.

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“…The subsurface modification technology is based on tightly focussing short lasers pulses inside a material, thereby creating localized changes to its crystal structure. Engineering applications of laser-induced subsurface modifications include the production of optical components [2][3][4][5][6], three-dimensional data storage [7], selective etching [8][9][10], selective metallization [11], twophoton polymerization [12] and improving the strength of glass [13]. Moreover, there is an interest in subsurface modifications for the study of matter under conditions of high pressure, since pressures in the TPa range can be induced when focussing laser pulses inside bulk materials [14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Crystal structure of laser-induced subsurface modifications in Si

et al. 2015

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Laser-induced subsurface modification of dielectric materials is a well-known technology. Applications include the production of optical components and selective etching. In addition to dielectric materials, the subsurface modification technology can be applied to silicon, by employing near to midinfrared radiation. An application of subsurface modifications in silicon is laser-induced subsurface separation, which is a method to separate wafers into individual dies. Other applications for which proofs of concept exist are the formation of waveguides and resistivity tuning. However, limited knowledge is available about the crystal structure of subsurface modifications in silicon. In this work, we investigate the geometry and crystal structure of laser-induced subsurface modifications in monocrystalline silicon wafers. In addition to the generation of lattice defects, we found that transformations to amorphous silicon and Si-III/Si-XII occur as a result of the laser irradiation.

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Laser microfabrication and rotation of ship-in-a-bottle optical rotators

Cited by 41 publications

References 21 publications

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications

Crystal structure of laser-induced subsurface modifications in Si

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