1998
DOI: 10.1063/1.121616
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Laser plasma x-ray contact microscopy of living specimens using a chemically amplified epoxy resist

Abstract: We report on the use of an epoxy based chemically amplified resist, to produce x-ray images of living biological specimens, exposed with laser plasma generated soft x rays, in the water window ͑2.3-4.4 nm͒. The photoresist response was at least two orders of magnitude ''faster'' than polymethyl methacrylate, the standard resist used so far in soft x-ray contact microscopy. Atomic force and scanning electron microscopy of the biological specimen images, recorded in the resist, clearly showed the flagella of the… Show more

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Cited by 22 publications
(6 citation statements)
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“…This is because the dissociative excited states of the small radicals occupy the energy range above 6.5 eV (200 nm). This unique functionality at low wavelengths and 157 nm allows for the unique bio-functionalities of surfaces [ 51 , 52 ]. Following laser irradiation at 157 nm, a drop of the liquid was deposited on a Si wafer and left to dry.…”
Section: Methodsmentioning
confidence: 99%
“…This is because the dissociative excited states of the small radicals occupy the energy range above 6.5 eV (200 nm). This unique functionality at low wavelengths and 157 nm allows for the unique bio-functionalities of surfaces [ 51 , 52 ]. Following laser irradiation at 157 nm, a drop of the liquid was deposited on a Si wafer and left to dry.…”
Section: Methodsmentioning
confidence: 99%
“…The main difference of our experiments from the earlier works on X-ray contact (proximity) microscopy with a laser plasma source (see, foe example, Cefalas et al, 1998;Ford et al, 1991;Limongi et al, 2004;Michette et al, 1986;Milani et al, 2005) consists in Fig. 4.…”
Section: Experimental Set-upmentioning
confidence: 83%
“…It can also be used for photoresists as well. 29,30 In the cases examined, the concentration of the photoacid generator ͑PAG͒ was 2.5%, 5%, and 10%. Its molecule is shown in Fig.…”
Section: A Resist Materials and Experimental Conditions Used In The Smentioning
confidence: 99%