The sections in this article are
Introduction
Electron Spectroscopies (
AES
,
XPS
)
Basic Aspects
Auger Electron Spectroscopy (
AES
)
X
‐Ray Photoemission Spectroscopy (
XPS
)
Ion Scattering Spectroscopies
General Aspects
Collision Kinematics
Low‐Energy Ions
R
utherford Scattering
Secondary Particles
Secondary Ion Mass Spectrometry
Secondary Neutrals
Photon Stimulation