Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light

Reijers, Sten A.; Kurilovich, Dmitry; Torretti, Francesco; Gelderblom, Hanneke; Versolato, Oscar

doi:10.1063/1.5026950

Cited by 15 publications

(9 citation statements)

References 17 publications

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“…[17,18]) and enables obtaining the velocity of the plasma-propelled liquid mass. This propulsion velocity is a convenient metric for laser-to-droplet alignment [19]. For each shot, we extract the propulsion speed; in the rest of the analysis we only consider the shots where the propulsion speed is comprised within ±5 % of the most likely propulsion speed.…”

Section: Methods Of Data Processingmentioning

confidence: 99%

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

et al. 2022

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We present a method to obtain the individual charge-state-dependent kinetic-energy distributions of tin ions emanating from a laser-produced plasma from their joint overlapping energy distributions measured by means of a retarding field energy analyzer (RFA). The method of extracting charge state specific parameters from the ion signals is described mathematically, and reinforced with experimental results. The absolute charge-state-resolved ion energy distributions is obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography.

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Section: Methods Of Data Processingmentioning

confidence: 99%

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

et al. 2022

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“…Two circularly polarized laser beams from independent Nd:YAG systems operating at 1064 nm wavelength are collinearly aligned onto the droplet. 21 The timing sequence of the laser pulses from these two systems is illustrated in Fig. 1(a).…”

Section: Experiments and Methodsmentioning

confidence: 99%

Laser-induced vaporization of a stretching sheet of liquid tin

Liu

Meijer

Hernández-Rueda

et al. 2021

Journal of Applied Physics

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We experimentally study the mass distribution of a sheet of liquid tin formed by the impact of a ns-laser pulse on a spherical microdroplet. The mass distribution is obtained using a low-intensity, second ns-laser pulse, which induces vaporization of the stretching thin tin sheet. This careful vaporization enables the investigation of the thickness profile of the sheet, and its mass, at early times after laser pulse impact on a droplet, which have remained inaccessible by the methods used in recent work [B. Liu et al., Phys. Rev. Appl. 13, 024035 (2020)]. The vaporization method, moreover, allows the visualization of the thick rim that bounds the thin sheet. Our results unambiguously demonstrate that increasing the energy of the ns-laser pulse incident on the droplet, which enables reaching a predetermined target radius more quickly, results in a larger mass fraction remaining in the sheet. Specifically, our studies show a doubling of the sheet mass fraction by reducing the required expansion time. As a corollary, less tin will end up in other channels of the mass distribution, such as fragments surrounding the sheet. Accordingly, more mass would be available in the target sheet for interaction with the more energetic, main laser pulse that is used in the industry to produce a hot and dense plasma from tin sheet targets in order to create extreme ultraviolet light for nanolithography.

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“…This is the time scale on which retraction of the sheet due to surface tension occurs. Theoretical work by Reijers et al [14], recently experimentally validated by Meijer et al [10], made clear that the time scale of significant changes in laser intensity (typically of the order of the laser pulse duration τ p ) over the time scale ordering τ e−i < τ h < τ a < τ i < τ c is a crucial factor determining the fluid-dynamic deformation of the droplet and final target morphology.…”

Section: Laser-droplet Interaction For Tin Target Preparationmentioning

confidence: 99%

“…This deformation process involves a plethora of physical processes, ranging from laser-matter interaction, to plasma radiation-hydrodynamics, to pure fluid mechanicswith a clear separation of the relevant time scales. The ordering of these time scales determines to a large degree the overall target morphology [10,14]. On one extreme end, short fsps laser pulses create bubble-like targets (see figure 1 bottom panel) as described by, e.g.…”

Section: Introductionmentioning

confidence: 99%

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Versolato

Sheil

Witte

et al. 2022

J. Opt.

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Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-of-the-art nanolithography. Currently, CO2 lasers are used to drive the plasma. In the future, solid-state mid-infrared lasers may instead be used to eﬃciently pump the plasma. Such laser systems have promise to be more compact, better scalable, and have higher wall-plug eﬃciency. In this Topical Review, we present recent ﬁndings at the Advanced Research Center for Nanolithography (ARCNL) on using 1- and 2-µm-wavelength solid-state lasers for tin target preparation and for driving hot and dense plasma. The ARCNL research ranges from advanced laser development, over studies of ﬂuid dynamic response of droplets to impact, radiation-hydrodynamics calculations of, e.g., ion “debris”, (EUV) spectroscopic studies of tin laser-produced-plasma, to high-conversion eﬃciency operation of 2-µm-wavelength driven plasma.

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Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light

Cited by 15 publications

References 17 publications

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Laser-induced vaporization of a stretching sheet of liquid tin

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

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