Lateral straggling and its influence on lateral diffusion in implantation with a focused ion beam

Batabyal, R.; Mahato, J. C.; Roy, Ajay; Roy, Sucharita; Bischoff, L.; Dev, B. N.

doi:10.1016/j.nimb.2010.11.039

Cited by 2 publications

(1 citation statement)

References 17 publications

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“…This result indicates that Au atoms form chemical bonds with Si at a part of the periphery of the Au nanoparticles upon annealing, and such subtle changes in the surface structure can be monitored using Bi 3 + -SIMS. Although few techniques (e.g., photoelectron emission microscopy and TEM) can give similar information, they are limited to well-defined surface structures, whereas Bi 3 + -SIMS can be applied even for much more complex surface structures with less crystallinity. , Using SIMS with cluster ions as the primary particles is a promising tool for obtaining information about the chemical environment of atoms on the surface of complex structures. We also showed that SIMS data obtained together with longer Ar 1000 + sputtering times should be carefully interpreted because lengthy sputtering can induce structural changes to the solid surfaces.…”

Section: Discussionmentioning

confidence: 99%

TOF-SIMS Analysis Using Bi₃⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal–Support Interactions

et al. 2019

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Au nanoparticles with a mean diameter of 20 nm with a coverage of ∼20% of the surface were distributed on a Si wafer surface and studied both before and after being annealed (at 100 and 300 °C). The two types of samples were analyzed using secondary ion mass spectroscopy (SIMS) with Bi 3 + clusters as the primary ions combined with surface etching using Ar 1000 + clusters. We observed a substantial difference in the SIMS spectra combined with a relatively short sputtering time of Ar 1000 + . In the nonannealed samples, bare Au cluster cations and Si + were observed in the SIMS spectra; AuSi + clusters were also observed in the annealed samples. These results indicate Au-silicide formation at a part of the periphery of the Au nanoparticles upon annealing. We suggest that SIMS experiments using cluster ions such as Bi 3 + can not only be used for surface elemental analyses but also provide information on local chemical environments of elements on the surface. This is an important issue in heterogeneous catalysis (e.g., strong metal–support interactions). We also advise that one should be careful interpreting the SIMS data combined with a longer Ar 1000 + sputtering time because this can deteriorate the surfaces from their original structures.

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Section: Discussionmentioning

confidence: 99%

TOF-SIMS Analysis Using Bi₃⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal–Support Interactions

et al. 2019

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2014

Surface Microscopy With Low Energy Electrons

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Lateral straggling and its influence on lateral diffusion in implantation with a focused ion beam

Cited by 2 publications

References 17 publications

TOF-SIMS Analysis Using Bi₃⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal–Support Interactions

TOF-SIMS Analysis Using Bi₃⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal–Support Interactions

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Lateral straggling and its influence on lateral diffusion in implantation with a focused ion beam

Cited by 2 publications

References 17 publications

TOF-SIMS Analysis Using Bi3+ as Primary Ions on Au Nanoparticles Supported by SiO2/Si: Providing Insight into Metal–Support Interactions

TOF-SIMS Analysis Using Bi3+ as Primary Ions on Au Nanoparticles Supported by SiO2/Si: Providing Insight into Metal–Support Interactions

Applications in Other Fields

Contact Info

Product

Resources

About

TOF-SIMS Analysis Using Bi₃⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal–Support Interactions

TOF-SIMS Analysis Using Bi₃⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal–Support Interactions