2019 IEEE MTT-S International Microwave Symposium (IMS) 2019
DOI: 10.1109/mwsym.2019.8700876
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Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

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Cited by 59 publications
(16 citation statements)
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“…XBARs can achieve a high frequency of more than 5 GHz, and a large of more than 20%, exceeding the traditional FBARs and SAW resonators due to the larger piezoelectric coefficients e 15 and e 24 of LiNbO 3 . In 2019, V. Plessky et al first presented a 4.8 GHz XBAR based on Z-cut LiNbO 3 thin film with a of 25%, showing the possibility of its application to filters in the 3–6 GHz range [ 12 ]. In 2020, Ruochen Lu presented XBAR in 128° Y-cut LiNbO 3 thin films with the of 46.4%, which obtained the highest value of [ 13 ].…”
Section: Introductionmentioning
confidence: 99%
“…XBARs can achieve a high frequency of more than 5 GHz, and a large of more than 20%, exceeding the traditional FBARs and SAW resonators due to the larger piezoelectric coefficients e 15 and e 24 of LiNbO 3 . In 2019, V. Plessky et al first presented a 4.8 GHz XBAR based on Z-cut LiNbO 3 thin film with a of 25%, showing the possibility of its application to filters in the 3–6 GHz range [ 12 ]. In 2020, Ruochen Lu presented XBAR in 128° Y-cut LiNbO 3 thin films with the of 46.4%, which obtained the highest value of [ 13 ].…”
Section: Introductionmentioning
confidence: 99%
“…So, Victor Plessky et al proposed an XBAR based on the ion-sliced monocrystalline LiNbO 3 layer on Si substrates with a high frequency around 4.8 GHz and 13.6 GHz suitable for the development of radio frequency RF filters. 8,9) Consequently, XBAR has a huge application prospect in 5G communication, even in the future sixthgeneration (6G) communication.…”
Section: Introductionmentioning
confidence: 99%
“…This promotes the emergence of a large number of new-type SAW devices, such as temperature-compensated SAW (TC-SAW) devices [ 11 , 12 , 13 ], incredible high-performance SAW (I.H.P. SAW) devices [ 14 , 15 ], and laterally-excited bulk-wave resonators (XBARs) [ 16 , 17 ]. Performances of those RF SAW devices are dominantly limited by their resonators.…”
Section: Introductionmentioning
confidence: 99%