The damage structures of a-Al 2 O 3 and a-SiC were examined as functions of ion implantation parameters usino Rutherford backscattering-channeling, analytical electron microscopy, and Raman spectroscopy. Low temperatures or high fluences cf cations favor formation of the amorphous state. At 300 K, mass of the bombarding species has only a small effect on residual damage, but certain ion specias appear to stabilize the damage microstructure and increase the rate of approach to the amorphous state. The type of chemical bonding present in the host lattice is an important factor in determining the residual-damage, state.