2007
DOI: 10.1063/1.2720752
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Layer-by-layer photonic crystal fabricated by low-temperature atomic layer deposition

Abstract: Layer-by-layer three-dimensional photonic crystals are fabricated by low-temperature atomic layer deposition of titanium dioxide on a polymer template created by soft lithography. With a highly conformal layer of titanium dioxide, a significantly enhanced photonic band gap effect appears at 3.1μm in transmittance and reflectance. From optical investigations of systematically shifted structures, the robust nature of the photonic band gap with respect to structural fluctuations is confirmed experimentally. With … Show more

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Cited by 23 publications
(25 citation statements)
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“…The highly ordered, uniform, and economical μLAs are fabricated by soft lithography imprinting of 2 μm-pitch square arrays, embossed on the blank side of a 1.1 mm thick indiumtin-oxide (ITO)-coated glass [11]. Thus, this technique does not interfere with the device fabrication process.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The highly ordered, uniform, and economical μLAs are fabricated by soft lithography imprinting of 2 μm-pitch square arrays, embossed on the blank side of a 1.1 mm thick indiumtin-oxide (ITO)-coated glass [11]. Thus, this technique does not interfere with the device fabrication process.…”
Section: Methodsmentioning
confidence: 99%
“…The majority of light is either reabsorbed by the materials or leaks out from the device edges where photon recapturing for useful emission has proven problematic. The use of microlens arrays (μLAs) is a notable approach to overcome the foregoing outcoupling limits [2][3][4][5][6][7][8][9][10][11]. However, fabrication of such arrays is either not economical or the resulting outcoupling enhancement is reported to be < 80%, especially if the array is either confined to an area directly under the pixel [2][3][4][5]7] or that area under the pixel is excluded [8].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, we have proposed the possibility that a semicrystalline woodpile PCs, in which no a large size of crystallite exists, would function as a perfect PC. 19 Here, we demonstrate soft-lithographical fabrication of the semicrystalline woodpile PC, and confirm that the semicrystalline PCs indeed exhibit optical performance approaching that of a perfect crystal for incoming light with incident angle ranging from the surface normal to 30°. As the semicrystalline PC can create a photonic band structure for perpendicularlyincoming light as well as well-defined short pathways through the PC to a substrate for charge/mass transport, we believe the fabrication method and the semicrystalline PCs can be valuable in meeting the requirements for applying conventional photonics to photochemistry, which is inherently difficult for one-dimensional and two-dimensional PCs.…”
Section: Semicrystalline Woodpile Photonic Crystals Without Complicatmentioning
confidence: 69%
“…Nonhydrolytic synthesis (sol-gel technique) is another method of fabrication that uses capping agents (Kajihara and Yao, 2000). There are other less common synthetic routes, such as solvothermal, oxidation (De Azevedo et al, 2006), hydrothermal (Sun et al, 2005;Xing et al, 2015), chemical vapor deposition (Lee et al, 2007), physical vapor deposition (Johnson and Walsh, 2011), electrodeposition, sonochemical, and microwave-assisted synthesis to fabricate TiO 2 NPs (Chen TH et al, 2008;Yallappa et al, 2013;Ali et al, 2015;Amiri et al, 2015;Helmbrecht et al, 2015). The techniques used for the hybridization of biomolecules to their surfaces have been examined and partially summarized in reports (Pieranski, 1983).…”
Section: Titanium Dioxidementioning
confidence: 99%