Layout optimization and modeling of an ESD-protection n-MOSFET in 0.13um silicide CMOS technology

Abstract

In this paper, a lot of CMOS devices with different device dimensions, spacings, and clearances have been drawn and fabricated to find the optimized layout rules for electrostatic discharge (ESD) protection in 0.13um Silicide CMOS Technology. The dependences of layout parameters on ESD protection ability of GGNMOS are investigated by using the TLP (transmission line pulsing) measurement technique. A DC model for modeling ESD NMOS snapback characteristics is also presented in this paper.