Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion

Polymeric-Based In Vitro Diagnostic Devices

“…Microvalves have been categorized into passive [144][145][146] and active [17,116,139,147,148,149,150,151,152,153] types for IVD applications. Passive valves usually take advantage of innovative geometric design and modification of surface energy [144][145][146].…”

A feasibility study on using inkjet technology, micropumps, and MEMs as fuel injectors for bipropellant rocket engines

“…Since the pressures involved are much lower than those found in a diesel engine, the piezoelectric actuators act directly on the nozzle needle. Using a similar, but longer, stacked piezoelectric actuator than the one described by Yang et al [21], a stroke distance on 50 mm will occur at an actuation voltage of 60 V for an actuator length of 50 mm. Further work is required to determine if this is sufficient to maintain the predicted flow rates, and also to ensure that the actuator supplies sufficient seating force to prevent leakage.…”

Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining

“…Many efforts have been made to develop various microvalves to meet different requirements for specific applications [2][3][4][5][6][7][8][9]. Though the configurations of these valves could be different (open or closed valve), the structures are very similar.…”

“…Table 1 gives an overview of earlier demonstrated microvalve [3][4][5][6][7][8][9]. Some of these valves meet most of the requirements, such as high inlet pressure, low leakage and process gas isolation but have relatively low flow rates [2,3,6,7]. In addition, these valves have relatively high power consumption and no control of flow at intermediate states between open and closed positions.…”