a b s t r a c tThe temperature dependent capacitance-voltage (C-V) and conductance-voltage (G/x-V) characteristics of (Ni/Au)/Al 0.22 Ga 0.78 N/AlN/GaN heterostructures were investigated by considering the series resistance (R s ) effect in the temperature range of 80-390 K. The experimental results show that the values of C and G/x are strongly functioning of temperature and bias voltage. The values of C cross at a certain forward bias voltage point ($2.8 V) and then change to negative values for each temperature, which is known as negative capacitance (NC) behavior. In order to explain the NC behavior, we drawn the C vs I and G/x vs I plots for various temperatures at the same bias voltage. The negativity of the C decreases with increasing temperature at the forward bias voltage, and this decrement in the NC corresponds to the increment of the conductance. When the temperature was increased, the value of C decreased and the intersection point shifted towards the zero bias direction. This behavior of the C and G/x values can be attributed to an increase in the polarization and the introduction of more carriers in the structure. R s values increase with increasing temperature. Such temperature dependence is in obvious disagreement with the negative temperature coefficient of R or G reported in the literature. The intersection behavior of C-V curves and the increase in R s with temperature can be explained by the lack of free charge carriers, especially at low temperatures.