Lifetime Measurements on a High-Reliability RF-MEMS Contact Switch

Newman, H. S.; Ebel, J.; Judy, D.C.; Maciel, J.J.

doi:10.1109/lmwc.2007.915037

Cited by 93 publications

(39 citation statements)

References 5 publications

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“…The human body can build up an electric potential more than 1000 volts, which can prove to be fatal for MEMS devices [58]. Numerous test standards, experimental procedures, and processes have been demonstrated to overcome the open, short circuit and ESD problems [59,60]. However, this area still requires more attention from researchers and academicians in order to rectify the reliability issues in these sophisticated MEMS devices.…”

Section: Reliabilitymentioning

confidence: 99%

Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments

Jan

Hamid

Khir

et al. 2014

Journal of Quality and Reliability Engineering

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The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro-and nano sizes on a single silicon substrate using microfabrication techniques. MEMS industry is at the verge of transforming the semiconductor world into MEMS universe, apart from other hindrances; the reliability of these devices is the focal point of recent research. Commercialization is highly dependent on the reliability of these devices. MEMS requires a high level of reliability. Several technological factors, operating conditions, and environmental effects influencing the performances of MEMS devices must be completely understood. This study reviews some of the major reliability issues and failure mechanisms. Specifically, the fatigue in MEMS is a major material reliability issue resulting in structural damage, crack growth, and lifetime measurements of MEMS devices in the light of statistical distribution and fatigue implementation of Paris' law for fatigue crack accumulation under the influence of undesirable operating and environmental conditions.

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Section: Reliabilitymentioning

confidence: 99%

Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments

Jan

Hamid

Khir

et al. 2014

Journal of Quality and Reliability Engineering

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“…McClure [105] proposed a mechanism for creating a charge distribution in the dielectric of the MEMS device exposed to nuclear radiation. Newman et al [106] presented the contact surface of a wafer-packaged RF MEMS switch damaged by ESD. It exhibits 914 billion switch cycles at 20 kHz with an incident RF frequency of 10 GHz without degradation, which has the longest lifetime of operation ever reported.…”

Section: B Dielectric Breakdown Due To Electrostatic Dischargementioning

confidence: 99%

MEMS Reliability Review

Huang

Vasan

Doraiswami

et al. 2012

IEEE Trans. Device Mater. Relib.

162

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Abstract-Microelectromechanical systems (MEMS) represents a technology that integrates miniaturized mechanical and electromechanical components (i.e., sensors and actuators) that are made using microfabrication techniques. MEMS devices have become an essential component in a wide range of applications, ranging from medical and military to consumer electronics. As MEMS technology is implemented in a growing range of areas, the reliability of MEMS devices is a concern. Understanding the failure mechanisms is a prerequisite for quantifying and improving the reliability of MEMS devices. This paper reviews the common failure mechanisms in MEMS, including mechanical fracture, fatigue, creep, stiction, wear, electrical short and open, contamination, their effects on devices' performance, inspection techniques, and approaches to mitigate those failures through structure optimization and material selection.

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“…To date, several test setups have been reported that have worked around some of these challenges to obtain useful device characteristics. In [2], the authors presented a RF-MEMS contact switch test setup that operated at a 20 kHz cycling rate. An RF input to the switch and a crystal detector on the output were used to monitor the contact characteristics and this data was periodically sampled.…”

Section: Introductionmentioning

confidence: 99%