“…In order to reduce the recombination of photocarriers and improve spatial resolution, the silicon bulk can be replaced with thin silicon films (thinned silicon substrate [38,39,40], silicon on insulator (SOI) [18], amorphous silicon (a-Si) [41,42,43,44] and silicon on sapphire (SOS) [45,46]) or other semiconductor thin layers deposited on transparent substrates (GaAs [47], GaN [48], In-Ga-Zn oxide (IGZO) [49] and indium tin oxide (ITO) [50]). The sensing material such as Si 3 N 4 [1,28,38,39,51], Al 2 O 3 [52,53,54], Ta 2 O 5 [51], HfO 2 [55,56,57], NbO x [40,58,59], SnO x [60], self-assembled organic monolayer (SAM) [61,62] and nanofibers [63,64] can be used for pH sensing. Other chemical species can be also detected by modifying the sensing surface with appropriate materials.…”