2013
DOI: 10.1117/1.jmm.12.2.023015
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Light confinement effect of nonspherical nanoscale solid immersion lenses

Abstract: Abstract. We report on the light confinement effect observed in nonideally shaped (i.e., nonspherical) nanoscale solid immersion lenses (SIL). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these noncircular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that nonideal SILs exhibit a spot size reduction comparable with that of spherical SILs. When… Show more

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Cited by 4 publications
(2 citation statements)
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“…Further investigation of nano-SILs of different shapes was reported as well [5]. However, the spot size reduction in those studies was weaker than predicted by macroscopic theory, where the refractive index n of the SIL is the expected reduction factor.…”
Section: Introductionmentioning
confidence: 91%
“…Further investigation of nano-SILs of different shapes was reported as well [5]. However, the spot size reduction in those studies was weaker than predicted by macroscopic theory, where the refractive index n of the SIL is the expected reduction factor.…”
Section: Introductionmentioning
confidence: 91%
“…This technique has been used successfully by many groups to form extended and highly regular micro-lens arrays, typically by fabricating a regular array of polymer pillars using photolithography, and then heating this array above the melting temperature to allow thermal reflow [65,66,76]. Thermal reflow can also be used on adsorbed colloidal spheres to fabricate plano-convex lenses [52,77].…”
Section: Applications Of Self-assembly To Nano-imagingmentioning
confidence: 99%