Linking simulated polycrystalline thin film microstructures to physical vapor deposition conditions

Monti, Joseph M.; Stewart, James A.; Custer, Joyce O.; Adams, David P.; Depla, Diederik; Dingreville, Remi Philippe Michel

doi:10.1016/j.actamat.2022.118581

Cited by 16 publications

(6 citation statements)

References 61 publications

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“…The growth mechanism and influencing parameters can explain the physical correlation between the thickness and the structural phase. Microstructure evolution over an extended thickness is depicted by the ratio of adatom mobility over the D r , as reported. , Hence, the observed (α + β)-W phase in a wide range of t W is intact with the optimized sputtering process parameters. The relative intensity of the β-(200), superimposed β-(210)/α-(110), and β-(211) peaks increases as the t W is increased.…”

Section: Resultssupporting

confidence: 64%

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Structural Phase Engineering of (α + β)-W for a Large Spin Hall Angle and Spin Diffusion Length

Sriram,

Mondal,

Pradhan

et al. 2023

J. Phys. Chem. C

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Spin−orbit coupling (SOC) plays a crucial role in spin-to-charge interconversion in ferromagnet (FM)−heavy metal (HM) heterostructures. The SOC of a heavy metal strongly depends on its crystalline phase. Here, we report a systematic study of the effect of growth rate (D r ) on SOC-related parameters such as the spin-mixing conductance (g ↓↑ ), spin diffusion length (λ sd ), spin transparency, and spin Hall angle (θ SH ) in (α + β)-W. X-ray diffraction (XRD) results for W sputtered at different D r values show that the adatom energy is critical in determining the structural phase. The thickness dependence of the XRD results shows that all films sputtered at 0.06 nm/s nucleate as (α + β)-W on the Si substrate. Four-probe resistivity measurements for (α + β)-W (10) show that the resistivity is linearly proportional to D r with a negative slope. A ferromagnetic resonance (FMR)-based spin pumping study shows that the line width (ΔH) is enhanced due to spin current transport across the Py/(α + β)-W interface. The g ↓↑ shows a maximum of 10.1 × 10 18 m −2 and a minimum of 4.2 × 10 18 m −2 at D r of 0.08 and 0.06 nm/s, respectively. The extracted spin diffusion length for (α + β)-W is 0.98 ± 0.01 nm. The calculated spin transparency for (α + β)-W is 0.74. The inverse spin Hall effect (ISHE) is demonstrated for Py(20)/(α + β)-W(10) bilayer heterostructures. From ISHE measurements, the calculated spin Hall angle for (α + β)-W is found to be θ SH = −0.24 ± 0.08. It is observed that D r strongly influences the spin diffusion length, spin transparency, and spin Hall angle. Our systematic study may open new possibilities for tuning spin transparency and spin Hall angle for developing low-power memory and logic devices.

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Section: Resultssupporting

confidence: 64%

“…Recent studies agreed with our results. 21,31 The observed resistivity drops as a function of D r signify the effects of kinetic energy on W thin films. III.1.2.…”

Section: Methodsmentioning

confidence: 96%

Structural Phase Engineering of (α + β)-W for a Large Spin Hall Angle and Spin Diffusion Length

Sriram,

Mondal,

Pradhan

et al. 2023

J. Phys. Chem. C

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“…The correlation of the electrical resistance profile and growth morphology as well as their relation with grain and sub-grain structure can be followed in figure 6. It is commonly accepted that the basic mechanism of charge transport in polycrystalline TCO films involves the tunneling of electrons through grain boundaries that are considered as potential barriers for electron flow over the Fermi level [29]. SSRM data indicate that in ZnO films doped using methane a significant part of electrical current flows along the grain/sub-grain boundaries.…”

Section: Discussionmentioning

confidence: 99%

Structural insight into nanoscale inhomogeneity of electrical properties in highly conductive polycrystalline ZnO thin films doped using methane

Vasin,

Gomeniuk,

Lytvyn

et al. 2024

J. Phys. D: Appl. Phys.

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Recently, methane has been demonstrated as an effective n-type dopant for ZnO thin films deposited using the RF-magnetron sputtering method. It was shown that the major electrical doping effect of methane is caused by hydrogen released during methane decomposition. This work investigates the origin of the observed increase in conductivity of methane-doped ZnO films with the increase in thickness. The study is aimed at describing the nature of this thickness-dependent effect through a detailed analysis of the thickness-dependent morphology and crystalline structure. A combination of structural, electrical, and optical characterization revealed a transition from fine-grained films with a random orientation at early stages to partially (002)-textured films with columnar grains at later stages of growth. It is demonstrated that grain/sub-grain boundaries increases the electrical conductivity and that the contribution of such buried inner boundaries increases with increasing thickness. It is proposed that hydrogen diffuses along the grain and sub-grain boundaries during growth, leading to continuous doping of the buried interfaces. This hydrogen diffusion mechanism results in an apparent “additional doping” of thicker films. The results provide new insights into the thickness-dependent conductivity of doped polycrystalline ZnO films mediated by hydrogen diffusion along internal interfaces.

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“…For example, advancements in thermal spray coatings have led to the development of nanostructured coatings with enhanced mechanical and tribological properties [47,48]. The refinement of PVD and CVD processes has enabled the deposition of thin films with precise control over composition, thickness, and microstructure [49][50][51]. Laser surface engineering techniques have benefited from advancements in laser technology, allowing for more precise and efficient surface modifications [38].…”

Section: Chemical Techniquesmentioning

confidence: 99%

Surface Engineering of Metals: Techniques, Characterizations and Applications

Ramezani

Ripin

Pasang

et al. 2023

Metals

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This paper presents a comprehensive review of recent advancements in surface engineering of metals, encompassing techniques, characterization methods and applications. The study emphasizes the significance of surface engineering in enhancing the performance and functionality of metallic materials in various industries. The paper discusses the different techniques employed in surface engineering, including physical techniques such as thermal spray coatings and chemical techniques such as electroplating. It also explores characterization methods used to assess the microstructural, topographical, and mechanical properties of engineered surfaces. Furthermore, the paper highlights recent advancements in the field, focusing on nanostructured coatings, surface modification for corrosion protection, biomedical applications, and energy-related surface functionalization. It discusses the improved mechanical and tribological properties of nanostructured coatings, as well as the development of corrosion-resistant coatings and bioactive surface treatments for medical implants. The applications of surface engineering in industries such as aerospace, automotive, electronics, and healthcare are presented, showcasing the use of surface engineering techniques to enhance components, provide wear resistance, and improve corrosion protection. The paper concludes by discussing the challenges and future directions in surface engineering, highlighting the need for further research and development to address limitations and exploit emerging trends. The findings of this review contribute to advancing the understanding of surface engineering and its applications in various sectors, paving the way for future innovations and advancements.

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Linking simulated polycrystalline thin film microstructures to physical vapor deposition conditions

Cited by 16 publications

References 61 publications

Structural Phase Engineering of (α + β)-W for a Large Spin Hall Angle and Spin Diffusion Length

Structural Phase Engineering of (α + β)-W for a Large Spin Hall Angle and Spin Diffusion Length

Structural insight into nanoscale inhomogeneity of electrical properties in highly conductive polycrystalline ZnO thin films doped using methane

Surface Engineering of Metals: Techniques, Characterizations and Applications

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