“…As can be seen, the Raman spectra at points 1 and 2 (the oxidized surface and the one closest to the surface crack of the sample in the region of the HfO 2 -SiO 2 layer, respectively) have the same set of bands. A detailed analysis of these spectra reveals 14 characteristic bands (ω 1 -ω 14 at 150, 165, 241, 257, 332, 381, 398, 499, 525, 554, 578, 631, 671 and 756 cm −1 ) of different intensities belonging to the Ag and Bg modes of the monoclinic phase of HfO 2 , in good agreement with the literature data [62][63][64][65]. In addition to the monoclinic HfO 2 phase, seven characteristic Raman modes of the ω H1 -ω H7 phase of hafnone (HfSiO 4 ) are detected at these sites at 442, 808, 854, 907, 937, 976 and 1028 cm −1 , which are also in good agreement with the available literature data [66][67][68][69].…”