Liquid crystal spatial light modulators in optical metrology

Falldorf, Claas; Kopylow, Christoph von; Bergmann, Ralf B.

doi:10.1109/wio.2010.5582527

Cited by 9 publications

(5 citation statements)

References 19 publications

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“…[32][33][34] Second, since our system is all-digital, we can scan the sample and introduce controlled phase delays with no moving parts, thus avoiding the typical instabilities common to mechanical scanning systems. We achieve this by patterning an initial flat field by means of a liquid-crystal SLM, 35 following standard structured or tailored light 26 generation techniques, 36 as has already proven useful in diverse applications in optical metrology, 37,38 such as rotation velocity [39][40][41] and refractive index 42 measurements. Together, these features make our system more robust against instabilities, thus enhancing its performance.…”

Section: Surface Mappingmentioning

confidence: 99%

Structured light for topography measurements in the nanometric regime

Rodríguez-Fajardo,

Forbes

2023

Complex Light and Optical Forces XVII

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Section: Surface Mappingmentioning

confidence: 99%

Structured light for topography measurements in the nanometric regime

Rodríguez-Fajardo,

Forbes

2023

Complex Light and Optical Forces XVII

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“…A number of LC photonic devices induces phase delays between different positions of the wavefront resulting in spatial light modulators (SLM) [6], [7]. SLMs have been used in many scenarios, e.g., spatial filters, holograms [8], light-path compensators, tunable lenses [9], or beam steerers [10], [11].…”

Section: Introductionmentioning

confidence: 99%

Reliability of Liquid Crystals in Space Photonics

Otón

Perez-Fernandez²,

Lopez-Molina³

et al. 2015

IEEE Photonics J.

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Passive liquid crystal (LC) devices are becoming an interesting alternative for the manufacturing of photonic devices in spatial applications. These devices feature a number of advantages in this environment, the lack of movable parts, and of exposed electronics being among the most outstanding ones. Nevertheless, the LC material itself must demonstrate its endurance under the harsh conditions of space missions, including launch and, perhaps, landing. In this paper, we present the environmental testing of an LC device for space applications. A number of LC based beam steering devices were manufactured, characterized, and tested in a series of destructive and nondestructive tests defined by the European Space Agency (ESA). The purpose was to evaluate the behavior and possible degradation of the LC response in simulated space environments. Device fabrication and testing was done within an ESA-funded project, whose purpose was the design, manufacturing, and characterization of adaptive optical elements, as well as the execution of qualification tests on the devices in space-simulated conditions.

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“…The MO was placed between the beam splitter and SLM to further enhance the precision of detecting very small features. Spatial light modulator 10,11 (Holoeye Pluto NIRII) operating in reflection phase-only modulation mode was used as a dummy device under test. SLMs are based on liquid crystals, and have been found in many applications for optical metrology 12 .…”

Section: Introductionmentioning

confidence: 99%

“…SLMs are based on liquid crystals, and have been found in many applications for optical metrology 12 . The essential benefits of utilizing SLM here is due to its high degree of adaptability, effective reproducibility and rapid switching time (on the order of 15 ms), without the need of moving any part perfunctorily 10 . In this set-up, the SLM is mounted on a NanoMax 3-Axis flexure stage, a motorized transition stage which is ideal for applications that require resolution smaller than a micron-scale.…”

Section: Introductionmentioning

confidence: 99%

Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps

Mądzik¹,

Taha²,

Flores³

et al. 2015

SPIE Proceedings

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Piezomachined ultrasonic transducer (PMUT) arrays are commonly found in applications in the field of ultrasonography and gesture recognition systems. Their application for bio and chemical sample preparation is another possibility, based on their beam steering and acoustic field manipulation capabilities. Post-fabrication non-destructive measurement of key device temporal and spatial parameters is required in order to adjust either simulation models or tune fabrication steps. In this work we report an optical testing setup for measuring the acoustic spectrum of PMUT devices and arrays, characterize maximum deflection of PMUTs and piezopumps and investigate the load effect of electrical contacts on the spatial and temporal oscillation behavior of these piezoelectric structures. Spatial parameters are evaluated with digital holography and temporal parameters with single point Doppler shift and frequency-shifted. We employ this testing setup to measure our own designed PMUT structures which were fabricated at IME-Singapore, evaluating the relative merits of the PMUT design parameters.

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Liquid crystal spatial light modulators in optical metrology

Cited by 9 publications

References 19 publications

Structured light for topography measurements in the nanometric regime

Structured light for topography measurements in the nanometric regime

Reliability of Liquid Crystals in Space Photonics

Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps

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