Liquid‐Mediated Three‐Dimensional Scanning Probe Nanosculpting

Gan, Tiansheng; Zhou, Feng; Ma, Chunfeng; Liu, Xuqing; Xie, Zhuang; Zhang, Guangzhao; Zheng, Zijian

doi:10.1002/smll.201300238

Cited by 13 publications

(11 citation statements)

References 55 publications

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“…Subsequently, polymer brushes were grown by surface‐initiated atom transfer radical polymerization (SI‐ATRP). Due to the steric effect, polymer chains at high surface‐density areas were taller than those at low surface‐density areas, resulting in the formation of 3D polymer brushes . Finally, the 3D polymer brushes were used as resists to form 3D Au structures by cycles of alternative plasma etching of the polymer and wet etching of Au, in which the lateral geometry was defined by poly(methyl methacrylate) (PMMA) brushes and height of each step was controlled by the etching conditions.…”

Section: Methodsmentioning

confidence: 99%

Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Chen

Xie

Wei

et al. 2015

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Section: Methodsmentioning

confidence: 99%

Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Chen

Xie

Wei

et al. 2015

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“…Techniques including photolithography, electron‐beam lithography, microcontact printing, and various scanning probe lithography (SPL) methods were employed to pattern initiators for making 3D polymer brushes. Among them, dip‐pen nanodisplacement lithography (DNL) is a recently‐developed SPL technique that allows precise nanoscale manipulation of the surface architecture with functional molecules and polymers in ambient environments .…”

Section: Introductionmentioning

confidence: 99%

Construction of 3D Polymer Brushes by Dip‐Pen Nanodisplacement Lithography: Understanding the Molecular Displacement for Ultrafine and High‐Speed Patterning

Chen

Zhou

Xie

et al. 2014

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Dip-pen nanodisplacement lithography (DNL) is a versatile scanning probe-based technique that can be employed for fabricating ultrafine 3D polymer brushes under ambient conditions. Many fundamental studies and applications require the large-area fabrication of 3D structures. However, the fabrication throughput and uniformity are still far from satisfactory. In this work, the molecular displacement mechanism of DNL is elucidated by systematically investigating the synergistic effect of z extension and contact time. The in-depth understanding of molecular displacement results in the successful achievement of ultrafine control of 3D structures and high-speed patterning at the same time. Remarkably, one can prepare arbitrary 3D polymer brushes on a large area (1.3 mm × 1.3 mm), with <5% vertical and lateral size variations, and a patterning speed as much as 200-fold faster than the current state-of-the-art.

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“…Moreover, it remains impossible for the developed micro-milling techniques to create hierarchical surfaces featuring superimposed secondary nanostructures on the basic curved walls of micro-channels. To decrease the feature dimensions, atomic force microscope (AFM) based nano-milling with controlled normal cutting force was developed to generate channels in the nanoscale, which can achieve sub-100 nm lateral resolution and sub-10 nm vertical resolution [16][17][18]. In general, it employs a sharp AFM tip on a flexible cantilever to fabricate nanoscale features at the expense of relatively low e ciency, low accuracy, and high tip wear rate, significantly restricting its application for high throughput requirements [16].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Zhu

Tong

et al. 2019

Precision Engineering

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A novel modulated diamond cutting (MDC) technique is proposed for the generation of complicated micro/nanofluidic channels. The MDC adopts a turning configuration through a four-axis ultra-precision diamond lathe, a motion modulation based milling operation is introduced by extending the virtual spindle technique. This unique principle makes the MDC more suitable to generate micro/nanofluidic channels through compromising certain inherent advantages of both diamond turning and milling. Moreover, taking advantage of axial servo motion modulation as well as tool mark modulation using the re-cutting e↵ect, complicated channels can be e↵ectively generated having spatially-varying shapes as well as hierarchical micro/nanostructures. Through both numerical simulation and experimental cutting, capability and outperformance of the MDC are demonstrated well. The result suggests that the MDC is capable to generate ultra-smooth channel surfaces with complicated shapes and superimposed surface nanostructures, exhibiting significant superiority for the generation of micro/nanofluidic channels with high flexibility, high e ciency, and high universality.

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Liquid‐Mediated Three‐Dimensional Scanning Probe Nanosculpting

Cited by 13 publications

References 55 publications

Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Construction of 3D Polymer Brushes by Dip‐Pen Nanodisplacement Lithography: Understanding the Molecular Displacement for Ultrafine and High‐Speed Patterning

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

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