Liquid Nitrogen Cold Traps

Meißner, Ch.

doi:10.1063/1.1771287

Cited by 14 publications

(2 citation statements)

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“…A high base vacuum in the chamber is desirable prior to bleeding of the sputtering gas into the chamber [4]. c. Cryogenically cooled Meissner traps were incorporated in the apparatus to reduce the water vapor pressure [5]. The sputtering gas was purified using a GP-100 silica gas purifier assembly (R.D Mathis Co.…”

Section: Sputter Deposition Of Ickel-iron Filmsmentioning

confidence: 99%

An Investigation into the Effects of Substrate Temperature on Magnetic Properties of RF Sputtered NiFe Films

Akhtar

Ali

Mahmud

2010

KEM

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The paper describes results of investigation on sputtered NiFe Films to determine the sputter deposition condition that could produce magnetic field sensors with the desired magnetic properties. The magnetic materials used in such devices should have a low coercive force, a low anisotropy field and a low magnetization dispersion, α50. .The results of systematic investigation of radio-frequency (RF) sputtered, RF biased, 82-18 % NiFe films showed (i) Improved Kobelev methods were applied to magneto-optic measurement techniques, suppress the magnetization ripples when subjected under the application of dc field. (ii) Anisotropy field results indicated an inverse trend with increasing substrate temperature (iii) the experimental measurements on magnetization dispersion relatively constant up to 200 °C with α50 approximately 1.2°, it then increases more sharply to about 3.5° at 400 °C substrate temperature. The work also provide understanding of the effects on the magnetic properties of sputtered magnetic films that is very limited as current literature is almost entirely limited to evaporated magnetic films.

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Section: Sputter Deposition Of Ickel-iron Filmsmentioning

confidence: 99%

An Investigation into the Effects of Substrate Temperature on Magnetic Properties of RF Sputtered NiFe Films

Akhtar

Ali

Mahmud

2010

KEM

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“…(J) water aspirator; (2) liquid nitrogen trap; (3) liquid helium trap; (4) 5-literlsecond Vac Ion pump; (5) oven; (6) evaporation chamber; (7) I" bakeable valve; (8) 2" ball valve; (9) ionization gauges; (10) bakeable mas.~spectrometer tube; (11) mass spectrometer tube; (12) Pirani gauge.…”

Section: • Ultra-high-vacuum Evaporatormentioning

confidence: 99%

Analysis of the Residual Gases in Several Types of High-Vacuum Evaporators

Caswell¹

1960

IBM J. Res. & Dev.

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A mass spectrometer study is made of the residual gases in several types of vacuum evaporators ranging from oil..cJiffusion-pumped, conventional systems to an oil.free, ultra.high.vacuum chamber. Partial pressures of water vapor, hydrogen, carbon monoxide, carbon dioxide, nitrogen, oxygen, argon and hydrocarbon vapors varied appreciably in the evaporators studied.The performance of a conventional system was improved by using special low-vapor-pressure gasket materials fa minimize hydrocarbon contamination, a liquid-nitrogen trap to reduce water vapor, titanium gettering for oxygen and nickel-iron gettering for hydrogen. For thin-film deposition, the importance of thoroughly outgassing the source matericds is pointed out. 130

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An evaporated film 135-cryotron memory plane

Kraus

1962

Microelectronics Reliability

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Liquid Nitrogen Cold Traps

Cited by 14 publications

References 0 publications

An Investigation into the Effects of Substrate Temperature on Magnetic Properties of RF Sputtered NiFe Films

An Investigation into the Effects of Substrate Temperature on Magnetic Properties of RF Sputtered NiFe Films

Analysis of the Residual Gases in Several Types of High-Vacuum Evaporators

An evaporated film 135-cryotron memory plane

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