Liquid-Phase Beam Pen Lithography

He, Shu; Xie, Zhuang; Park, Daniel J.; Liao, Xing; Brown, Keith A.; Chen, Peng Cheng; Zhou, Yu; Schatz, George C.; Mirkin, Chad A.

doi:10.1002/smll.201502666

Cited by 16 publications

(25 citation statements)

References 37 publications

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“…Wu et al also demonstrated a V-shaped PDMS tip coated with a thin film of metal for large-area sub-wavelength nanopatterning [ 174 ] as well as fabricating nanopatterns using the aperture existing at the oblique sidewalls of PDMS relief structures [ 175 ]. BPL is also used in a liquid form to synthesize nucleotides [ 176 ]. Liquid-phase BPL provides a way to perform local photochemical reactions that requires a liquid medium.…”

Section: Advancement Of Scalable Tbn Approachesmentioning

confidence: 99%

Tip-Based Nanofabrication for Scalable Manufacturing

Hu¹,

Kim

Somnath

2017

Micromachines

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Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.

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Section: Advancement Of Scalable Tbn Approachesmentioning

confidence: 99%

Tip-Based Nanofabrication for Scalable Manufacturing

Hu¹,

Kim

Somnath

2017

Micromachines

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“…Each tip actually acts like a near-field scanning optical microscopy (NSOM) tip, resulting in feature sizes below the diffraction limit of the employed UV light source. Relevant applications of this method were demonstrated in the field of photochemical reactions for nucleotide synthesis, 31 metal oxide synthesis 32 and nanoscale confined oxidation reactions, 33 but the use of BPL is not directly applicable for printing delicate biomolecules at high resolution due to the need for UV light to trigger the patterning process.…”

Section: Caterina Alfanomentioning

confidence: 99%

“Writing biochips”: high-resolution droplet-to-droplet manufacturing of analytical platforms

Arrabito

Gulli

Alfano

et al. 2022

Analyst

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“…Nevertheless, trade-offs are inevitable among cost, throughput, flexible feature size, and geometry, , and a cost-effective photolithographic strategy to produce submicron patterns with flexible feature geometries over a large area remains elusive . Recently, the development of polymer pen lithography, beam pen lithography (BPL), and related techniques has enabled nanopatterns over a large range of the nanoscale. ,,− However, it is challenging to apply BPL to the fabrication of TFTs or FETs because this requires an opaque metal for the coating and subsequent creation of subwavelength nanoscopic apertures at the apexes of metal-coated elastomeric pyramids, , and the repeated friction between metal-coated tips and substrates gradually wears off the metal coating …”

mentioning

confidence: 99%

Nanostructured High-Performance Thin-Film Transistors and Phototransistors Fabricated by a High-Yield and Versatile Near-Field Nanolithography Strategy

Huang

Chen

et al. 2019

ACS Nano

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Thin-film transistors (TFTs) and field-effect transistors (FETs) are basic units to build functional electronic circuits and investigate transport physics. In conventional TFTs or FETs, performance in terms of current level, on−off ratio, and the sensitivity of detection is limited by homogeneous semiconducting layers. In this paper, we develop TFTs with submicron heterostructures by using a strategy based on near-field photolithography. We use an array of totalreflective polydimethylsiloxane pyramids or trenches as a soft photomask in photolithography to induce multiple reflections and diffractions to focus the light. The textured feature enables the generation of gaps, dots, and grids at the nanoscale, with dimensions as small as sub-100 nm on substrates at the centimeter scale. We demonstrated the very high performance oxide TFTs on the nanoscale and periodic degenerately doped heterojunctions, and they yielded a nearly 20fold increase in transconductance and apparent device mobility. The on−off ratio was higher than 10 9 , with notably enhanced output current and clear scaling effect with channel length. We also built nanostructured wide-gap/narrow-gap heterojunctions to balance the high on−off ratio and sensitive photoresponse in a unidirectional phototransistor. This study shows the viability of programming a variety of nanoscale submicron patterns or interfaces in TFTs and FETs to significantly enlarge the scope of research on multifunctional TFTs and FETs.

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Liquid-Phase Beam Pen Lithography

Cited by 16 publications

References 37 publications

Tip-Based Nanofabrication for Scalable Manufacturing

Tip-Based Nanofabrication for Scalable Manufacturing

“Writing biochips”: high-resolution droplet-to-droplet manufacturing of analytical platforms

Nanostructured High-Performance Thin-Film Transistors and Phototransistors Fabricated by a High-Yield and Versatile Near-Field Nanolithography Strategy

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