Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters

Bousquet, Marie; Perreau, P.; Maeder-Pachurka, Catherine; Joulie, A.; Delaguillaumie, Fanny; Delprato, Julien; Enyedi, Grégory; Castellan, G.; Eleouet, Clement; Farjot, Thierry; Billard, C.; Reinhardt, Alexandre

doi:10.1109/ius46767.2020.9251654

Cited by 34 publications

(12 citation statements)

References 13 publications

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“…Recent development in 2D piezoelectric materials clearly demonstrate that 3R‐MoS 2 is capable of maintaining its piezoelectricity for the thickness of a few tens of nanometers. [ 36,68 ] Compared to the resonance frequencies and electromechanical coupling coefficients of several thin film resonators reported by different groups since 2000 [ 2,4,43–65 ] as shown in Figure , the 3R‐MoS 2 SMR developed in this study has the highest fundamental resonant frequency and the highest electromechanical coupling coefficient to the best of our knowledge. These results suggest that utilization of 2D 3R‐MoS 2 flakes for FBAR devices could be a feasible way‐out strategy to achieve higher operation frequencies.…”

Section: Resultsmentioning

confidence: 62%

“…Resonance frequencies and electromechanical coupling coefficients of several thin film resonators reported by different groups and this work. [ 2,4,43–65 ] …”

Section: Resultsmentioning

confidence: 99%

“…Although recent research shows acoustic resonators based on ion-sliced LiNbO 3 and LiTaO 3 could have good performance at sub-6 GHz band, those materials are still facing problems caused by thinning. [43,44,50,57,62,67] This largely restrains further increases in the operation frequencies of thickness mode acoustic wave resonators. Recent development in 2D piezoelectric materials clearly demonstrate that 3R-MoS 2 is capable of maintaining its piezoelectricity for the thickness of a few tens of nanometers.…”

Section: Characterization Of 3r-mos 2 Nanoflake Based Smrsmentioning

confidence: 99%

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Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

Yang

Sun

Cai

et al. 2023

Adv Funct Materials

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Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for ultra-high working frequencies are in urgent demand to meet the requirements of the fast-growing 5/6G telecommunication techniques. Recent advances in 2D piezoelectric nanomaterials create an opportunity in this perspective. Here, the first FBAR chip based on 2D 3R-MoS 2 ultrathin piezoelectric flakes with a solidly mounted resonator (SMR) architecture is reported. The typical resonant frequency for an SMR device based on ≈200 nm 3R-MoS 2 flake reaches over 25 GHz with high reproducibility. Theoretical and finite element analysis suggest that the observed resonance is of longitudinal acoustic modes. This study demonstrates for the first time that the access to 2D piezoelectric nanomaterials makes high performance piezoelectric devices feasible for various promising applications including high-speed telecommunication, acousto-optic, and sensor fields,etc.

show abstract

Section: Resultsmentioning

confidence: 62%

“…Resonance frequencies and electromechanical coupling coefficients of several thin film resonators reported by different groups and this work. [ 2,4,43–65 ] …”

Section: Resultsmentioning

confidence: 99%

Section: Characterization Of 3r-mos 2 Nanoflake Based Smrsmentioning

confidence: 99%

See 1 more Smart Citation

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

Yang

Sun

Cai

et al. 2023

Adv Funct Materials

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“…The 510 nm 128°Y-cut LiNbO 3 thin film, which was thinned down from a single-crystal wafer and transferred onto a 4-inch silicon (Si) wafer, was provided by NGK Insulators, Ltd. 29 . Such films retain high crystallinity and bulk material properties 45 . The release window was defined by electron beam lithography (EBL) and plasma etching.…”

Section: Device Fabricationmentioning

confidence: 99%

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Lee

Jahanbani²,

Kramer³

et al. 2023

Nat Commun

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Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.

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“…In recent years, new materials such as LiNbO 3 [ 11 ] and AlScN [ 12 ] have come into play, offering good prospects for increasing piezoelectric activity to achieve broader bandwidths. Despite its very large electromechanical coupling factor, LiNbO 3 poses serious manufacturing challenges when it comes to integrating it into acoustic resonators, mainly due the difficulty of growing LiNbO 3 thin films with good crystalline properties at temperatures compatible with ongoing resonator technologies [ 13 , 14 , 15 ].…”

Section: Introductionmentioning

confidence: 99%

Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films

et al. 2023

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This work presents a study on the homogeneity and thermal stability of Al0.7Sc0.3N films sputtered from Al-Sc segmented targets. The films are sputtered on Si substrates to assess their structural properties and on SiO2/Mo-based stacked acoustic mirrors to derive their piezoelectric activity from the frequency response of acoustic resonators. Post-deposition annealing at temperatures up to 700 °C in a vacuum are carried out to test the stability of the Al0.7Sc0.3N films and their suitability to operate at high temperatures. Despite the relatively constant radial composition of the films revealed from RBS measurements, a severe inhomogeneity in the piezoelectric activity is observed across the wafer, with significantly poorer activity in the central zone. RBS combined with NRA analysis shows that the zones of lower piezoelectric activity are likely to show higher surface oxygen adsorption, which is attributed to higher ion bombardment during the deposition process, leading to films with poorer crystalline structures. AFM analysis reveals that the worsening of the material properties in the central area is also accompanied by an increased roughness. XRD analysis also supports this hypothesis, even suggesting the possibility of a ScN non-piezoelectric phase coexisting with the AlScN piezoelectric phase. Thermal treatments do not result in great improvements in terms of piezoelectric activity and crystalline structure.

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Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters

Cited by 34 publications

References 13 publications

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films

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Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters

Cited by 34 publications

References 13 publications

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS2 Atomic Flakes

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS2 Atomic Flakes

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films

Contact Info

Product

Resources

About

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes