2016
DOI: 10.3390/app6090250
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Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces

Abstract: Abstract:The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Metal Dichalcogenides (TMDCs). We show the results of a systematic study of the parameters that affect the LON p… Show more

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Cited by 14 publications
(16 citation statements)
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“…The field of nanotechnology has diversified into different areas of research, from materials science to biotechnology. Many of these applications are based on the ability to fabricate or manipulate nanostructured materials [1]. One convenient technique for structuring, manipulation, and fabrication at the nanometer scale is atomic force microscopy (AFM) nanolithography.…”
Section: Introductionmentioning
confidence: 99%
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“…The field of nanotechnology has diversified into different areas of research, from materials science to biotechnology. Many of these applications are based on the ability to fabricate or manipulate nanostructured materials [1]. One convenient technique for structuring, manipulation, and fabrication at the nanometer scale is atomic force microscopy (AFM) nanolithography.…”
Section: Introductionmentioning
confidence: 99%
“…On the contrary, the bias-assisted method entails applying a voltage between the AFM tip and the substrate in contact with the sample. The tip-sample voltage induces an electrochemical reaction that produces oxide on the surface of the substrate [1].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Among SPL methods, oxidation scanning probe lithography (o-SPL) enables the direct and resist-less nanopatterning of a large variety of materials [4][5][6], from silicon to 2D electronic materials; from self-assembled monolayers to biomolecules. The direct and resist-less lithography offered by o-SPL has generated a variety of nanopatterns on layered materials such as graphene and transition metal dichalcogenides [7][8][9][10][11][12]. The patterning capability has also been exploited to fabricate several electronic devices including quantum point contacts and fieldeffect transistors on layered materials [13][14][15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…The single-crystal growth details can be found in [36]. A rectangular-shaped sample was obtained following exactly the same method used by Xiao et al [37].…”
mentioning
confidence: 99%