Local Quantum Well Intermixing for Fabricating High-Speed Electroabsorption Modulator

Chen, Chih-Hsien; Wang, Po-Yun; Chen, Rih-You; Chen, Cong-Long; Chen, Yang-Jeng; Chiu, Yi‐Jen

doi:10.1109/ipcon.2018.8527091

Cited by 1 publication

(1 citation statement)

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“…By measuring the far-field patterns of the optical waveguide, the refractive index confinement was confirmed, which was consistent with the simulation results. In addition, the electro-absorption modulator was defined through IFVD QWI [6]. The strong Fabry-Perot oscillation and quantum confined Stark effect were observed, which suggested that the low optical loss and carrier confinement were achieved using this kind of buried waveguide.…”

Section: Introductionmentioning

confidence: 99%

Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing

Chen

et al. 2020

IEEE Photonics J.

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A new method for fabricating a high-quality buried-heterostructure optical waveguide using quantum well intermixing (QWI) has been demonstrated. By patterning a SiO 2 thin film on top of a multiple quantum well (MQW) heterostructure, rapid thermal annealing (RTA) could induce laterally local QWI, resulting in a bandgap blueshift and a simultaneous decrease in the refractive index. Both lateral bandgap and index engineering could be attained along the MQW plane, which could be used for a buried-heterostructure optical waveguide. Two SiO 2 strips with 3, 5 and 7 µm windows were fabricated for waveguide on a 1540 nm InGaAsP MQW sample. A 120 nm blueshift under the SiO 2 area was observed, leading to the index contrast of 0.07. Far-field optical diffraction measurements were also performed to yield angles of 13.9°, 12.8°and 10.6°. A narrower window resulted in a narrower optical waveguide width and exhibited a larger diffraction angle, suggesting that QWI defined the buried optical waveguide. In addition, an electroabsorption modulator was also made by buried waveguide. A −10 dB low optical insertion loss and a 15 dB high extinction ratio in a 500 µm long waveguide were obtained, indicating that a buried heterostructure could be used for photonic devices and integration applications.

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Section: Introductionmentioning

confidence: 99%