Local-Wetting-Induced Deformation of Rolled-Up Si/Si-Ge Nanomembranes: A Potential Route for Remote Chemical Sensing

Yu, Minrui; Huang, Minghuang; Savage, D. E.; Lagally, M. G.; Blick, Robert H.

doi:10.1109/tnano.2010.2066986

Cited by 6 publications

(1 citation statement)

References 21 publications

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“…The flattened membranes resulting from this process provide model systems for fundamental scientific studies of crystalline sheets with nanoscale thicknesses, free from the influence of a supporting substrate and with greatly reduced artifacts from strain variations and curvature. In addition, within the SiGe/Si nanomembrane system flattened structures can find applications in freestanding chemical and gas sensors [25,26], micro-and nano-electro-mechanical devices [27][28][29], thermal waveguides and thermal diodes [30], and flexible thin film transistors with high-current drive capacity and high electron mobility [10].…”

Section: Resultsmentioning

confidence: 99%

Fabrication of flat SiGe heterostructure nanomembrane windows via strain-relief patterning

McElhinny

Gopalakrishnan

Savage

et al. 2014

J. Phys. D: Appl. Phys.

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The lattice mismatch between SiGe and Si in heteroepitaxial Si/SiGe/Si trilayers leads to buckling when confined nanomembrane windows formed from these heterostructures are released from silicon-on-insulator substrates. We demonstrate that large areas in which the curvature and curvature-induced strain are reduced by an order of magnitude can be produced by patterning the windows to concentrate buckling in narrow arms with low flexural rigidity supporting a flat central region. Synchrotron x-ray thermal diffuse scattering shows that the improved flatness of patterned windows permits fundamental studies with fidelity similar to what can be achieved with flat single-component Si nanomembranes.

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