Strain engineering and mechanical assembly of silicon/germanium nanomembranes

Guo, Qinglei; Di, Zengfeng; Lagally, M. G.; Mei, Yongfeng

doi:10.1016/j.mser.2018.02.002

Cited by 54 publications

(38 citation statements)

References 291 publications

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“…2D materials such as graphene and molybdenum disulphide demonstrate tunable material properties under mechanical deformation such as tensile strain, showing great potential for utilization in electronics [1]. While their bulk material counterparts, such as bulk silicon, break at nominal strains of less than 2% [2], atomically thin crystals are capable of withstanding reversible strains up to 20% without degradation in material quality [3], [4]. Existing methodologies for strain engineering 2D materials typically include manipulation of the underlying substrate such as bending [5] or elongating [6] flexible substrates, piezoelectric stretching of substrates by applying a gate voltage [7], or using differential pressures on membranes over wells [8], [9].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials in Air

Vutukuru

Christopher

Pollock

et al. 2019

J. Microelectromech. Syst.

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We present electrothermal microelectromechanical (MEMS) actuators as a practical platform for straining 2D materials. The advantages of the electrothermal actuator is its high output force and displacement for low input voltage, but its drawback is that it is actuated by generating high amounts of heat. It is crucial to mitigate the high temperatures generated during actuation for reliable 2D material strain device implementation. Here, we implement a chevron actuator design that incorporates a thermal isolation stage in order to avoid heating the 2D material from the high temperatures generated during the actuation. By comparing experiment and simulation, we ensure our design does not compromise output force and displacement, while keeping the 2D material strain device stage cool. We also provide a simple analytical model useful for quickly evaluating different thermal isolation stage designs .Index Terms-Microelectromechanical Systems (MEMS), 2D materials, strain engineering, thermal management, Raman spectroscopy, IR thermometry, finite-element simulation.

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Section: Introductionmentioning

confidence: 99%

Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials in Air

Vutukuru

Christopher

Pollock

et al. 2019

J. Microelectromech. Syst.

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“…Inspired by concepts of origami and kirigami, researchers folded and rolled these nanomembranes into a number of fascinating 3D structures . Several review articles have been published with emphasis on nanomembranes thinning and manufacture, mechanical deformation, fundamental studies, and their practical applications . By releasing strain‐engineered planar functional nanomembranes on sacrificial layers, complex rolled‐up structures including tubes, rings, and helices can be constructed (for instance, see Figure f).…”

Section: Introductionmentioning

confidence: 99%

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Huang

et al. 2018

Adv Materials Technologies

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chemical vapor deposition (CVD). When it comes to on-chip integrations, these strategies are limited by accessible materials and slow processing rate, [31] and the generated defects in the produced amorphous materials placed restrictions to its further applications in high-performance devices. [32] Therefore, novel approaches and methods of fabricating 3D micro/ nanostructures are highly demanded.Rolled-up nanotechnology is an alternative technique that fabricates 3D nanostructures out of planar films called nanomembranes. Nanomembranes are defined as planar thin films with thicknesses between one to a few hundred nanometers. [33] These nanomembrane materials behave like soft materials while maintaining excellent properties like their bulk counterpart and therefore is an ideal platform for fabricating 3D nanostructures. Inspired by concepts of origami and kirigami, [34][35][36][37] researchers folded and rolled these nanomembranes into a number of fascinating 3D structures. [17,[38][39][40][41][42][43][44] Several review articles have been published with emphasis on nanomembranes thinning and manufacture, mechanical deformation, fundamental studies, and their practical applications. [33,41,[45][46][47] By releasing strain-engineered planar functional nanomembranes on sacrificial layers, complex rolled-up structures including tubes, [48][49][50][51][52][53][54] rings, [54][55][56] and helices [42,[57][58][59] can be constructed (for instance, see Figure 1f). This approach can be applied to engineer a wide range of organic and inorganic materials and their combinations, including metals, insulators, traditional semiconductor families, and recently emerged 2D materials. Given its compatibility to standard CMOS fabrication process and ability to manufacture large periodic arrays with precise geometric control, rolled-up nanotechnology further expands the applications of 3D nanostructures to a number of areas, including optical resonators, [60,61] photodetectors, [62,63] micromotors, [64][65][66] energy storage, [67] drug delivery, [68] gas detection, [53] and environmental decontamination. [69] The versatility in the materials design and geometric tuning in rolled-up nanotechnology presents tremendous opportunities for further developing sophisticated 3D fine structures.In this review, we focus on the materials perspective and fabrication process of rolled-up nanotechnology. First, we give a brief introduction of rolled-up mechanism, as well as its fabrication techniques and control strategies. We summarize and highlight recent advances of different materials systems and their corresponding rolling methodologies. Second, Rolled-up nanotechnology is an appealing technique that tunes planar films into complex 3D fine structures. The rolling-up mechanism and methodology of a huge variety of materials and their combinations are summarized, including metals, insulators, traditional semiconductor families, polymers, and recently emerged 2D materials. The basic principles of strain induction, fabrication methods, and techni...

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“…As a result, they are promising for a wide range of basic studies and device applications in flexible (opto)electronics. [9][10][11][12][13][14][15] In the context of light-emitting materials and devices, NM strain engineering has been applied recently to mechanically stressed Ge, where sufficiently large tensile strain ($2%) could be introduced to obtain direct-bandgap behavior with highly enhanced radiative efficiency. 16,17 Tensile strain in typical semiconductors (including Ge as well as standard III-V optoelectronic materials) also has the effect of decreasing the bandgap energy, by simultaneously lowering the conductionband edge and raising the valence-band maximum.…”

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confidence: 99%

Ultrawide strain-tuning of light emission from InGaAs nanomembranes

Wang

Cui

Bhat

et al. 2018

Applied Physics Letters

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Single-crystal semiconductor nanomembranes provide unique opportunities for basic studies and device applications of strain engineering by virtue of mechanical properties analogous to those of flexible polymeric materials. Here, we investigate the radiative properties of nanomembranes based on InGaAs (one of the standard active materials for infrared diode lasers) under external mechanical stress. Photoluminescence measurements show that, by varying the applied stress, the InGaAs bandgap energy can be red-shifted by over 250 nm, leading to efficient strain-tunable light emission across the same spectral range. These mechanically stressed nanomembranes could therefore form the basis for actively tunable semiconductor lasers featuring ultrawide tunability of the output wavelength.

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Strain engineering and mechanical assembly of silicon/germanium nanomembranes

Cited by 54 publications

References 291 publications

Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials in Air

Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials in Air

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Ultrawide strain-tuning of light emission from InGaAs nanomembranes

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