Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

Yang, Cheng; Wang, Yin; Fan, Wei

doi:10.3390/mi13030412

Cited by 13 publications

(4 citation statements)

References 29 publications

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“…Recent works have shown that fuzzy logic improves the performance of conventional controllers in the presence of disturbances and nonlinear behavior [14][15][16]. It has been found that the action of actuators can be reduced by up to 50% by running a fuzzy controller instead of a PID controller, thereby reducing energy consumption and associated costs [17,18]. Researchers have used fuzzy logic to identify system parameters and modify controller gains because its implementation is relatively simple.…”

Section: Related Workmentioning

confidence: 99%

Fuzzy Logic and Genetic-Based Algorithm for a Servo Control System

et al. 2022

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Performing control is necessary for processes where a variable needs to be regulated. Even though conventional techniques are widely preferred for their implementation, they present limitations in systems in which the parameters vary over time, which is why methods that use artificial intelligence algorithms have been developed to improve the results given by the controller. This work focuses on implementing a position controller based on fuzzy logic in a real platform that consists of the base of a 3D printer, the direct current motor that modifies the position in this base, the power stage and the acquisition card. The contribution of this work is the use of genetic algorithms to optimize the values of the membership functions in the fuzzification of the input variables to the controller. Four scenarios were analyzed, in which the trajectory and the weight of the system were modified. The results obtained in the experimentation show that the rising and setting times of the proposed controller are better than those obtained by similar techniques that were previously developed in the literature. It was also verified that the proposed technique reached the desired values even when the initial conditions in the system changed.

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Section: Related Workmentioning

confidence: 99%

Fuzzy Logic and Genetic-Based Algorithm for a Servo Control System

et al. 2022

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“…As the extension of the piezoelectric elements is small; therefore, the inchworm device needs to be designed with a clamping unit to clamp the slide tightly and the drive should have a self-locking ability when the signal is removed. The recent works on the self-locking at rest feature of Inchworm drive include [37][38][39][40][41]. In most of these self-locking mechanisms, the piezo actuator itself moves and the guiding component remains stationary.…”

Section: Introductionmentioning

confidence: 99%

Implementation of a motion planning technique for a low-frequency piezo-actuated inchworm drive

Dsouza,

Muralidhara,

Jain

2024

Phys. Scr.

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A novel piezoelectric inchworm drive capable of long-range motion has been designed, fabricated, and tested in this research work. To control the motion of the inchworm drive, trajectory planning has been proposed. The trajectory planning ensures that the inchworm drive achieves smooth and continuous motion with high accuracy. Two trajectory planning methods were incorporated for the developed inchworm drive: a linear function with a parabolic blend trajectory and a cubic polynomial trajectory. Simulations for both the cubic polynomial and trapezoidal trajectories were conducted, with the estimated displacement results closely verified through experimental validation. The fabricated inchworm drive is tested for varying input voltages and frequencies. The experimental findings demonstrate that the proposed piezoactuated Inchworm drive can achieve substantial displacement, constrained only by the linear slides length. When an input signal of 150 V peak to peak and frequency of 10 Hz is applied the inchworm drive, it was capable of moving at a speed of 1425 µm/s. When incorporating trajectory planning for the Inchworm drive the experimental results show that the maximum percentage error for the trapezoidal motion profile is 1.56% and the cubic polynomial profile trajectory is within 1% for the corresponding target position for a travel range of 25 mm of the inchworm drive. 

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“…Furthermore, it relies on friction to drive the actuator to achieve both large stroke and high precision motion. Currently, the piezoelectric motors reliant on friction can be divided into ultrasonic type [ 11 , 12 , 13 ], inertial type [ 14 , 15 , 16 ] and inchworm type [ 17 , 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Experiment of a Clamping-Drive Alternating Operation Piezoelectric Actuator

2023

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In recent years, piezoelectric actuators, represented by inertial and inchworm actuators, have been widely applied because of their high accuracy and excellent responsiveness. Despite the development of various piezoelectric actuators, there remain some flaws in this technology. The sticking point is that the piezoelectric actuators based on the friction driving principle are prone to unwanted backward motion when outputting stepping motion. It is thus urgent to explore solutions from the perspectives of principle and structure. In this paper, a clamping-drive alternating operation piezoelectric actuator is proposed, the two feet of which are driven by two piezoelectric stacks, respectively. Due to double-foot alternate drive guide movement, backward movement is prevented in theory. By adopting the double-layer stator structure, integrated processing and assembly are facilitated. Meanwhile, a double flexible hinge mechanism is installed in the stator to prevent the drive foot from being overturned due to ineffectiveness and premature wear. In addition, the stator is equipped with the corresponding preload mechanism and clamping device. After the cycle action mechanism of one cycle and four steps is expounded, a model is established in this study to further demonstrate the principle. With the prototype produced, a series of experiments are performed. In addition, the amplitude of actuation of the stator is tested through amplitude experiment. The performance of the stator is evaluated by conducting experiments in the alternating step and single step actuation modes. Finally, the test results are analyzed to conclude that the actuator operating in either of these two modes can meet the practical needs of macro and micro actuation.

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Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

Cited by 13 publications

References 29 publications

Fuzzy Logic and Genetic-Based Algorithm for a Servo Control System

Fuzzy Logic and Genetic-Based Algorithm for a Servo Control System

Implementation of a motion planning technique for a low-frequency piezo-actuated inchworm drive

Design and Experiment of a Clamping-Drive Alternating Operation Piezoelectric Actuator

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