Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors

Wang, P.; Majerus, Steve; Karam, Robert; Hanzlicek, Brett; Lin, Dong; Zhu, Hui; Anderson, James M.; Damaser, Margot S.; Zorman, Christian A.; Ko, Wen H.

doi:10.1109/transducers.2015.7180966

Cited by 12 publications

(17 citation statements)

References 6 publications

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“…High permeability to gases and vapors, although useful for some applications, may limit the application of silicone elastomer for encapsulation purposes. Nevertheless, the packaging performance of silicone elastomer can be further enhanced when it is used in conjunction with other materials such as glass, parylene, and metal [28,89,121]. Additionally, it can be used to make transparent, flexible, and stretchable bioelectrodes [90,122,123,124].…”

Section: Organic Materialsmentioning

confidence: 99%

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

2019

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The development of reliable long-term encapsulation technologies for implantable biomedical devices is of paramount importance for the safe and stable operation of implants in the body over a period of several decades. Conventional technologies based on titanium or ceramic packaging, however, are not suitable for encapsulating microfabricated devices due to their limited scalability, incompatibility with microfabrication processes, and difficulties with miniaturization. A variety of emerging materials have been proposed for encapsulation of microfabricated implants, including thin-film inorganic coatings of Al2O3, HfO2, SiO2, SiC, and diamond, as well as organic polymers of polyimide, parylene, liquid crystal polymer, silicone elastomer, SU-8, and cyclic olefin copolymer. While none of these materials have yet been proven to be as hermetic as conventional metal packages nor widely used in regulatory approved devices for chronic implantation, a number of studies have demonstrated promising outcomes on their long-term encapsulation performance through a multitude of fabrication and testing methodologies. The present review article aims to provide a comprehensive, up-to-date overview of the long-term encapsulation performance of these emerging materials with a specific focus on publications that have quantitatively estimated the lifetime of encapsulation technologies in aqueous environments.

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Section: Organic Materialsmentioning

confidence: 99%

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

2019

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“…Silicone encapsulation was chosen for the prototype short-term in vitro testing. More robust packaging scheme such glass hematic encapsulation and multiple polymer layers coating 35 will be considered for future long-term in vivo application.…”

Section: Measurement Resultsmentioning

confidence: 99%

Implantable wireless battery recharging system for bladder pressure chronic monitoring

et al. 2015

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This paper presents an implantable wireless battery recharging system design for bladder pressure chronic monitoring. The wireless recharging system consists of an external 15 cm-diameter 6-turn powering coil and a silicone-encapsulated implantable rectangular coil with a dimension of 7 mm × 17 mm × 2.5 mm and 18 turns, which further encloses a 3 mm-diameter and 12 mm-long rechargeable battery, two ferrite rods, an ASIC, and a tuning capacitor. For a constant recharging current of 100 μA, an RF power of 700 μW needs to be coupled into the implantable module through the tuned coils. Analyses and experiments confirm that with the two coils aligned coaxially or with a 6 cm axial offset and a tilting angle of 30°, an external power of 3.5 W or 10 W is required, respectively, at an optimal frequency of 3 MHz to cover a large implant depth of 20 cm.

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“…To chronically implant the Bionode in a rodent model for any length of time, it must be encapsulated in a package that insulates it from tissue. Many materials including polymers, metals, ceramics, and glasses have been used in recent years for hermetic and non-hermetic implantable device packaging [36][37][38][39]. While metal packages with glass or ceramic feedthroughs have become popular for long term medical implants, the sealing processes often require highly controlled environments and expensive precision equipment (i.e., infrared lasers to melt glass or laser-beam welders to fusion weld metals).…”

Section: Packaging Considerationsmentioning

confidence: 99%

The Bionode

Pederson

Quinkert

Arafat

et al. 2019

ACM Trans. Embed. Comput. Syst.

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Implantable closed-loop neuromodulation devices for use in long-term chronic studies in a lab or clinical trial are expensive to acquire and difficult to modify for specific use cases. This article documents the design and fabrication of a wireless implantable device using only commercially available off-the-shelf (COTS) components. This device, called the Bionode, can record and transmit up to four channels of biopotential data while simultaneously providing biphasic constant-current stimulation. The Bionode is a viable, low-cost, reusable, and easily modifiable research tool with clinical implications that has gained widespread use in various research projects at Purdue University. CCS Concepts: • Hardware → Bio-embedded electronics; Wireless devices; • Computer systems organization → Firmware;

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Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors

Cited by 12 publications

References 6 publications

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

Implantable wireless battery recharging system for bladder pressure chronic monitoring

The Bionode

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