1988
DOI: 10.1007/bf02441836
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Long-term implants of Parylene-C coated microelectrodes

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Cited by 224 publications
(135 citation statements)
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“…14 Parylene C is a highly biocompatible material, which has a long history of use in the field of medical implants and microdevices, such as pacemakers, 15 sensors, 16 and microelectrodes. 17 Besides biocompatibility, the material has been widely used for encapsulation due to its excellent electrical, thermal, and physical properties. These inherent properties, however, are thickness dependent, [18][19][20] which is attributed to a transition from an amorphous to a semicrystalline structure as thickness increases.…”
Section: Introductionmentioning
confidence: 99%
“…14 Parylene C is a highly biocompatible material, which has a long history of use in the field of medical implants and microdevices, such as pacemakers, 15 sensors, 16 and microelectrodes. 17 Besides biocompatibility, the material has been widely used for encapsulation due to its excellent electrical, thermal, and physical properties. These inherent properties, however, are thickness dependent, [18][19][20] which is attributed to a transition from an amorphous to a semicrystalline structure as thickness increases.…”
Section: Introductionmentioning
confidence: 99%
“…(14) Oxidative degradation, including thermal and photooxidation, has been reported to cause failures in Parylene films. (15,16) Shaw et al have suggested that annealing films directly after Parylene deposition would result in a film that is more resistant to oxidation.…”
Section: Introductionmentioning
confidence: 99%
“…More importantly, its pinhole-free conformal coating ability enables fabrication of high-aspect-ratio hollow tubes in a single material layer. Microfabricated parylenebased devices have been reported in applications such as implantable microelectrodes, neurocages, neuroprobes and retinal prostheses [14][15][16][17][18][19]. These examples support utilization of parylene for flexible and implantable biomedical microdevices.…”
Section: Materials Selectionmentioning
confidence: 91%