2009
DOI: 10.1111/j.1551-2916.2008.02627.x
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Lost Mold Rapid Infiltration Forming of Mesoscale Ceramics: Part 1, Fabrication

Abstract: Free-standing mesoscale (340 lm  30 lm  20 lm) bend bars with an aspect ratio over 15:1 and an edge resolution as fine as a single grain diameter (B400 nm) have been fabricated in large numbers on refractory ceramic substrates by combining a novel powder processing approach with photoresist molds and an innovative lost-mold thermal process. The colloid and interfacial chemistry of the nanoscale zirconia particulates has been modeled and used to prepare highly concentrated suspensions. Engineering solutions t… Show more

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Cited by 19 publications
(33 citation statements)
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“…The strength of the Gen1 material with trapezoidal cross section, dishing, and warping was reported previously 7. The mechanical strengths of the Gen2 material with rectangular and nontrapezoidal cross sections but with dishing and warping present and the Gen3 material with a rectangular cross section, minimal dishing, and minimal warping are reported in this study.…”
Section: Introductionsupporting
confidence: 79%
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“…The strength of the Gen1 material with trapezoidal cross section, dishing, and warping was reported previously 7. The mechanical strengths of the Gen2 material with rectangular and nontrapezoidal cross sections but with dishing and warping present and the Gen3 material with a rectangular cross section, minimal dishing, and minimal warping are reported in this study.…”
Section: Introductionsupporting
confidence: 79%
“…Ceramics, particularly yttria-tetragonal zirconia polycrystals (Y-TZP), have the high fracture strength and elastic modulus required for mesoscale surgical instruments 5. In the first part of this series on mesoscale (i.e., sub-millimeter) manufacturing, we reported a new microfabrication approach based on Y-TZP nanoparticulate processing, lost mold-rapid infiltration forming (LM-RIF) 7. The generation 1 (Gen1) mechanical test bend bars had a relatively high aspect ratio (15:1) and high resolution edges (<1 μm), and were manufactured in large numbers on refractory substrates (up to 200 000 bend bars per 10 cm × 10 cm refractory substrate).…”
Section: Introductionmentioning
confidence: 99%
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“…47 Using this technique, a mold, which could be personalized with imaging and computer modeling and design, is fabricated with a desired porosity and geometry. This mold could be cast with the calcium phophosilicate suspension discussed above incorporating the desired optimized nanotopography.…”
Section: Limitations and Future Prospectsmentioning
confidence: 99%
“…It is known that bare SU-8 structures can exhibit a negative slope as well because of the absorption of deep UV light in the upper layer. Using a UV-filter to remove the sub-365 nm light could help reduce the effect of the negative slope [32,33].…”
Section: Pattern Transfer In Composite Microstructuresmentioning
confidence: 99%